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Plasma and particles dynamics modeling in PECVD reactors.

机译：PECVD反应器中的等离子体和粒子动力学建模。

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摘要

In the present work, low pressure radio-frequency (RF) plasma glow discharge, typical of those generated in the plasma processing industry, is numerically modeled via two well-established continuum models. The local field approximation model equations are solved in both a parallel-plate and a cylindrical reactor using a finite difference scheme. The effects of reactor pressure and applied RF voltage on the plasma parameters are examined. In the local energy approximation model, a high-order finite volume method is employed in a one-dimensional geometry. Here, temporal discretization is performed via backward difference schemes of first and second orders. Utilizing the deferred correction technique, high-order Lagrange polynomials are used to calculate the convection and diffusion fluxes at the cell faces, as well as the gradient fields at the cell centers. To evaluate the accuracy and performance of the method, comparisons with respect to CPU time, accuracy level and order are carried out among various methods and resolutions. Depending on the spatial scheme method, spatial error convergence exhibits up to fourth-order global trend with increasing the number of control volumes.;After the spatial distribution of the time-averaged, quasi-steady-state plasma variables are achieved from the local field approximation model, (sub-)micron-sized dust particles injected into the plasma are tracked in a Lagrangian framework. In doing so, the transient equations for particles motion and charge, together with the various forces acting on each particle, are considered. In the case of a single particle in a parallel-plate reactor, the abilities of two of the well-known ion drag expressions in modeling the particle dynamics are examined. Also, transient characteristic of charging process of smaller particles with respect to their motion time scale is elaborated. Further, in the presence of a temperature gradient in the plasma chamber, the qualitative effect of the thermophoretic force on the particle motion is discussed. In a cylindrical plasma chamber, equilibrium configurations of a few interacting dust particles are modeled. Direct comparison of the results with experiment demonstrates excellent qualitative agreement. Based on the ion focus phenomenon, a physical model is formulated and proven successful in simulating the vertically aligned structures.
机译：在当前的工作中，通过两个完善的连续模型对低压射频（RF）等离子体辉光放电（在等离子体处理工业中通常会产生的放电）进行数值建模。使用有限差分方案在平行板和圆柱反应堆中求解局部场近似模型方程。检查了反应堆压力和施加的RF电压对等离子体参数的影响。在局部能量近似模型中，在一维几何中采用高阶有限体积法。在此，时间离散通过一阶和二阶的后向差分方案执行。利用延迟校正技术，高阶拉格朗日多项式用于计算单元表面的对流和扩散通量以及单元中心的梯度场。为了评估该方法的准确性和性能，在各种方法和解决方案之间对CPU时间，准确性级别和顺序进行了比较。根据空间方案的方法，随着控制量的增加，空间误差的收敛呈现出四阶全局趋势。在时间平均的空间分布之后，从局部场获得准稳态等离子体变量在近似模型中，在拉格朗日框架中跟踪注入到等离子体中的（亚）微米灰尘颗粒。这样做时，要考虑粒子运动和电荷的瞬态方程，以及作用在每个粒子上的各种力。在平行板反应器中只有一个粒子的情况下，检查了两个众所周知的离子拖曳表达式对粒子动力学建模的能力。此外，详细阐述了较小粒子的充电过程相对于其运动时间尺度的瞬态特性。此外，在等离子体室中存在温度梯度的情况下，讨论了热泳力对粒子运动的定性作用。在圆柱形等离子室中，模拟了一些相互作用的尘埃颗粒的平衡构型。结果与实验的直接比较显示出极好的定性一致性。基于离子聚焦现象，建立了物理模型并证明其在模拟垂直排列的结构方面是成功的。

著录项

  • 作者

    Davoudabadi, Mohammad.;

  • 作者单位

    University of Illinois at Chicago.;

  • 授予单位 University of Illinois at Chicago.;
  • 学科 Engineering Mechanical.
  • 学位 Ph.D.
  • 年度 2008
  • 页码 126 p.
  • 总页数 126
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 机械、仪表工业;
  • 关键词

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