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Capacitive position-sensing interface for micromachined inertial sensors.

机译：用于微机械惯性传感器的电容式位置感应接口。

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摘要

In this work, issues related to monolithic integration of micromachined inertial sensors, including accelerometers and gyroscopes, are investigated.; Mechanical sensitivity, noise, and experimental performance verification of the open-loop accelerometer are discussed. The resolution of a position-sensing accelerometer can be improved by increasing the mechanical sensitivity and the accuracy of position measurement. 1μG/ Hz (1G = 9.8m/s2) acceleration sensitivity and 0.1pm/ Hz (1pm = 10−12m) displacement resolution can be achieved using capacitive position-sensing techniques.; Issues in designing a ΣΔ closed-loop sensor, such as system modelling, noise interaction, and verification of an analytical ΣΔ loop model with simulation and measurement results, are also described. A 2nd-order electromechanical ΣΔ force-feedback loop is transformed into a discrete-time ΣΔ modulator. The 1-bit quantizer is linearized using the least mean square (LMS) method that takes its nonlinear behavior into account. In the linearized model, the effective quantizer gain is determined statistically based upon the RMS value of the signal at its input. Reducing loop gain of a ΣΔ closed-loop sensor increases the output quantization noise. Interaction between electronic noise and quantization noise in the 2nd-order ΣΔ closed-loop sensor is revealed.; Vibratory rate gyroscopes for all three-axis have been implemented using capacitive position-sensing and ΣΔ force-feedback techniques.; The specific contributions of this work include: (1) The accuracy of an open-loop acceleration sensor is improved by increasing both the mechanical sensitivity and the accuracy of position measurement. The accuracy of position measurement is improved by optimizing the electromechanical interface, where the major concerns are damping and wiring parasitics. (2) By understanding noise interaction and its effect on ΣΔ loop operation, noise floor of the ΣΔ closed-loop sensor is improved. Results from the analytical model and simulation are in good agreement with measurement results. (3) The position-sensing interface can be adapted easily to demonstrate new MEMS concepts that rely on position measurement, making it a modular approach. For instance, a novel vertically-driven X/Y-axis gyroscope has been implemented using a position-sensing interface that has been designed for a Z-axis gyroscope. (Abstract shortened by UMI.)
机译：在这项工作中，研究了与微机械惯性传感器（包括加速度计和陀螺仪）的单片集成有关的问题。讨论了开环加速度计的机械灵敏度，噪声和实验性能验证。可以通过提高机械灵敏度和位置测量精度来提高位置感应加速度计的分辨率。 1μ G / Hz （1 G = 9.8 m / s 2 ）加速度敏感度和0.1 pm / Hz （1 pm = 10 −12 m ）位移分辨率可以使用电容位置实现-传感技术。还描述了设计∑Δ闭环传感器时的问题，例如系统建模，噪声交互作用以及使用仿真和测量结果验证解析∑Δ环路模型的问题。将2 nd 阶机电ΣΔ力反馈回路转换为离散时间ΣΔ调制器。使用最小均方（LMS）方法将1位量化器线性化，该方法考虑了其非线性行为。在线性化模型中，有效量化器增益是根据输入信号的RMS值统计确定的。减小ΣΔ闭环传感器的环路增益会增加输出量化噪声。揭示了2阶斜率∑Δ闭环传感器中电子噪声与量化噪声之间的相互作用。所有三轴振动速率陀螺仪均采用电容式位置感应和ΣΔ力反馈技术实现。这项工作的具体贡献包括：（1）通过提高机械灵敏度和位置测量精度来提高开环加速度传感器的精度。通过优化机电接口来提高位置测量的准确性，机电接口的主要考虑因素是阻尼和布线寄生效应。 （2）通过了解噪声相互作用及其对ΣΔ环路操作的影响，改进了ΣΔ闭环传感器的本底噪声。分析模型和模拟的结果与测量结果非常吻合。 （3）可以轻松地调整位置感应界面，以展示依赖于位置测量的新MEMS概念，使其成为模块化方法。例如，一种新颖的垂直驱动的X / Y轴陀螺仪已使用为Z轴陀螺仪设计的位置感应界面实现。 （摘要由UMI缩短。）

著录项

  • 作者

    Jiang, Xuesong.;

  • 作者单位

    University of California, Berkeley.;

  • 授予单位 University of California, Berkeley.;
  • 学科 Engineering Electronics and Electrical.
  • 学位 Ph.D.
  • 年度 2003
  • 页码 101 p.
  • 总页数 101
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 无线电电子学、电信技术;
  • 关键词

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