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Study of PECVD films containing flourine and carbon and diamond like carbon films for ultra low dielectric constant interlayer dielectric applications.

机译：用于超低介电常数层间电介质应用的含氟和碳的PECVD膜和类金刚石碳膜的研究。

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作者
Sundaram, Nandini Ganapathy.;
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作者单位

The University of Texas at Dallas.;

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授予单位 The University of Texas at Dallas.;
学科 Electrical engineering.;Materials science.
学位 Ph.D.
年度 2016
页码 137 p.
总页数 137
原文格式 PDF
正文语种 eng
中图分类康复医学;
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专利

1. Study of layered diamond like carbon and PECVD fluorocarbon films for ultra low dielectric constant interlayer dielectric applications [J] . Nandini G. Sundaram, Seetharaman Ramachandran, Lawrence Overzet, Journal of Materials Research . 2016,第8期

机译：用于超低介电常数层间电介质应用的层状类金刚石碳和PECVD碳氟化合物薄膜的研究
2. Characterization of low-dielectric-constant SiOC thin films deposited by PECVD for interlayer dielectrics of multilevel interconnection [J] . Kim HJ., Shao Q., Kim YH. Surface & Coatings Technology . 2003,第1a3期

机译：PECVD沉积的用于多层互连的层间电介质的低介电常数SiOC薄膜的特性
3. Low-Dielectric-Constant Nonporous Fluorocarbon Films for Interlayer Dielectric [J] . Azumi Itoh, Atsutoshi Inokuchi, Seiji Yasuda, Japanese journal of applied physics . 2008,第4issue2期

机译：用于层间介电的低介电常数无孔氟碳薄膜
4. Study and Optimization of PECVD Films Containing Fluorine and Carbon Layered with Diamond Like Carbon Films as Ultra Low Dielectric Constant Interlayer Dielectrics [C] . Nandini G. Sundaram, Seetharaman Ramachandran, Gil-Sik Lee, Materials Research Society Symposium on Diamond Electronics and Biotechnology . 2013

机译：用金刚石含有氟和碳层的PECVD薄膜的研究与优化碳膜作为超低介电恒晶间层电介质
5. Enhanced mechanical performance of low dielectric constant thin films synthesized in supercritical carbon dioxide, and SANS studies of microemulsions induced or destabilized by compressed carbon dioxide [D] . Romang, Alvin Horatio 2012

机译：超临界二氧化碳中合成的低介电常数薄膜的增强的机械性能，以及压缩二氧化碳诱导或破坏的微乳液的SANS研究
6. Logic circuits composed of flexible carbon nanotube thin-film transistor and ultra-thin polymer gate dielectric [O] . Dongil Lee, Jinsu Yoon, Juhee Lee, -1

机译：由柔性碳纳米管薄膜晶体管和超薄聚合物栅极电介质组成的逻辑电路
7. Supercritical Carbon Dioxide Extraction of Porogens for the Preparation of Ultralow Dielectric Constant Films [O] . T. Rajagopalan, S. Gangopadhyay, H. -c. Kim, 2003

机译：超临界二氧化碳萃取致孔剂制备超低介电常数薄膜
8. Supercritical Carbon Dioxide Extraction of Porogens for the Preparation of Ultralow Dielectric Constant Films [R] . Rajagopalan, T., Sun, J., Lahlouh, B., 2003

机译：超临界二氧化碳萃取致孔剂制备超低介电常数薄膜

Study of PECVD films containing flourine and carbon and diamond like carbon films for ultra low dielectric constant interlayer dielectric applications.

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