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A new bonding technology using gold-tin multilayer composites for microelectronics and photonics.

机译:一种将金锡多层复合材料用于微电子学和光子学的新粘合技术。

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摘要

This dissertation presents research on a new bonding technology using gold-tin multilayer composites and the study of thermal stress in die-attachment. Nearly perfect bondings were achieved as determined by a scanning acoustic microscope (SAM). After 40 cycles of thermal shock test, bonding degradation and die cracking were not observed. Scanning electron microscope (SEM) and energy dispersive X-ray (EDX) studies on the cross-section of the bonding layers reveal some basic mechanisms which might have occurred during the bonding process.;Monolithic microwave integrated circuits (MMICs) devices are extremely difficult to bond by using regular preforms due to their very small thickness and the large number of via holes on the devices. By using this new technology, 100 ;I have also developed a 240;This technology is not restricted to the use of the Au-Sn material and it can also be applied to other bonding materials. Successful die attach has been demonstrated at 200
机译:本文提出了一种使用金-锡多层复合材料的新型粘接技术的研究,以及芯片贴装中的热应力研究。如通过扫描声显微镜(SAM)所确定的,实现了近乎完美的结合。经过40次热冲击测试后,未观察到键合降解和管芯开裂。扫描电子显微镜(SEM)和能量色散X射线(EDX)对键合层横截面的研究揭示了键合过程中可能发生的一些基本机理。;单片微波集成电路(MMIC)器件极其困难由于它们的厚度非常小,并且器件上的通孔数量很多,因此可以使用常规的预成型件进行粘接。通过使用这项新技术,100;我还开发了240;该技术不仅限于使用Au-Sn材料,还可以应用于其他键合材料。成功的芯片贴装已在200处得到证明

著录项

  • 作者

    Wang, Chen-Yu.;

  • 作者单位

    University of California, Irvine.;

  • 授予单位 University of California, Irvine.;
  • 学科 Materials science.;Electrical engineering.
  • 学位 Ph.D.
  • 年度 1992
  • 页码 110 p.
  • 总页数 110
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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