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首页> 外文学位 >Thermal degradation and tribological behavior of diamond-like carbon films prepared by plasma-assisted chemical vapor deposition.
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Thermal degradation and tribological behavior of diamond-like carbon films prepared by plasma-assisted chemical vapor deposition.

机译：通过等离子体辅助化学气相沉积制备的类金刚石碳膜的热降解和摩擦学行为。

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摘要

During isothermal anneal of diamond-like carbon (DLC) films in vacuum in the temperature range of 560 to 1060K, gases consisting of hydrogen and hydrocarbons, mainly methane, were produced and identified by a line-of-sight technique with a residual gas analyzer. The evolution of gases was attributed to the dissociation of sp{dollar}sp3{dollar} C-H bonds at all temperatures, but at temperatures above 860K, both sp{dollar}sp2{dollar} and sp{dollar}sp3{dollar} C-H bonds contributed to the formation of the gaseous species. Experimental results were interpreted by invoking a two-phase structural model of DLC. The first phase or the matrix mainly consisted of a random network of fourfold carbons passivated by double or/and triple hydrogens. The other graphitic phase accounted for less than 20% of the volume of the film.; The wear rates and the friction coefficients of DLC films sliding against a silicon nitride ball were measured in a pin-on-disk tribometer in argon and air of varying relative humidity. The wear rate of the ball and the DLC film were determined by profilometry and by optical microscopy. The friction coefficient was independent of film stress. The wear rate increased by less than one order of magnitude as the stress increased from 1.3 to 2.6 GPa. In 100% humid air, debonding was observed between the DLC film and the substrate during sliding. In 50% relative humidity, the measured wear rates of the ball and the DLC film were of the order of 10{dollar}sp{lcub}-8{rcub}{dollar} and 10{dollar}sp{lcub}-7{rcub}{dollar} mm{dollar}sp3{dollar}/Nm under a 1 kg load and for a sliding distance of 1000m. In dry argon, air and 100% humid air, the wear rate of the ball was not detectable but those of the films were 10{dollar}sp{lcub}-9{rcub}{dollar}, 10{dollar}sp{lcub}-9{rcub}{dollar} and 10{dollar}sp{lcub}-8{rcub}{dollar} mm{dollar}sp3{dollar}/Nm, respectively. The measured friction coefficients were 0.06 in dry argon, 0.08 in 50% humid air and 0.09 in 100% humid argon and 0.2 in the other conditions. In dry argon, the contact area of the ball was covered with a material transferred from the DLC film during sliding. The low friction coefficient and the low wear rate measured in dry argon are attributed to this transferred film. (Abstract shortened with permission of author.)
机译：在560至1060K的真空温度下对类金刚石碳（DLC）膜进行等温退火期间，产生了由氢和烃（主要为甲烷）组成的气体，并通过视线技术与残留气体分析仪进行了识别。气体的释放归因于在所有温度下sp {dollar} sp3 {dollar} CH键的解离，但在高于860K的温度下，sp {dollar} sp2 {dollar}和sp {dollar} sp3 {dollar} CH键都会解离促进了气态物种的形成。通过调用DLC的两相结构模型来解释实验结果。第一相或基质主要由四重碳的无规网络组成，四重碳被双或/和三氢钝化。另一石墨相占膜体积的不到20％。在针盘式摩擦计中，在相对湿度变化的氩气和空气中，测量了在氮化硅球上滑动的DLC膜的磨损率和摩擦系数。球和DLC膜的磨损率通过轮廓测定法和光学显微镜确定。摩擦系数与膜应力无关。随着应力从1.3 GPa增加到2.6 GPa，磨损率增加了不到一个数量级。在100％的潮湿空气中，在滑动过程中观察到DLC膜与基材之间的剥离。在50％的相对湿度下，测得的球和DLC薄膜的磨损率约为10 {dollar} sp {lcub} -8 {rcub} {dollar}和10 {dollar} sp {lcub} -7 { rcub} {dollar} mm {dollar} sp3 {dollar} / Nm在1 kg负载下的滑动距离为1000m。在干燥的氩气，空气和100％的潮湿空气中，无法检测到球的磨损率，但薄膜的磨损率分别为10 {dollar} sp {lcub} -9 {rcub} {dollar}，10 {dollar} sp {lcub } -9 {rcub} {dollar}和10 {dollar} sp {lcub} -8 {rcub} {dollar} mm {dollar} sp3 {dollar} / Nm。在干氩中测得的摩擦系数为0.06，在50％湿空气中为0.08，在100％湿氩中为0.09，在其他条件下为0.2。在干燥的氩气中，在滑动过程中，球的接触区域被从DLC膜转移来的材料覆盖。在干燥的氩气中测得的低摩擦系数和低磨损率归因于该转移膜。 （摘要经作者许可缩短。）

著录项

  • 作者

    Kim, Daesig.;

  • 作者单位

    Stevens Institute of Technology.;

  • 授予单位 Stevens Institute of Technology.;
  • 学科 Engineering Materials Science.
  • 学位 Ph.D.
  • 年度 1991
  • 页码 133 p.
  • 总页数 133
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 工程材料学;
  • 关键词

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