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A simplified model of planetary chemical vapor deposition reactors.

机译：行星化学气相沉积反应器的简化模型。

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摘要

A simplified model for planetary chemical vapor deposition reactors is proposed and used to compute deposition species mole fraction and deposition rate in the reactor depletion zone. First, the modeling and optimization work performed in the literature is reviewed and their representative deposition rate profiles are extracted. Afterwards, several simplifying assumptions are applied to derive the reactor modeling equation, and the eigenfunction expansion solution is subsequently computed using a previously developed MATLAB object-oriented computational framework. The simulation result for the deposition profile is improved by modifying the inlet boundary condition, and is then compared with the previously published profiles. The MATLAB optimization toolbox is used to find the optimal deposition profile giving the best match with the published, detailed simulator profiles. Finally, an evaluation of the model consistency with the published results is given.
机译：提出了行星化学气相沉积反应器的简化模型，并用于计算反应堆耗尽区的沉积物种类摩尔分数和沉积速率。首先，回顾文献中进行的建模和优化工作，并提取其代表性的沉积速率曲线。然后，应用几个简化的假设来推导反应堆建模方程，然后使用先前开发的MATLAB面向对象的计算框架来计算特征函数扩展解。通过修改入口边界条件可以改善沉积轮廓的模拟结果，然后将其与先前发布的轮廓进行比较。 MATLAB优化工具箱用于查找与已发布的详细模拟器配置文件最匹配的最佳沉积配置文件。最后，给出了模型与已发布结果的一致性评估。

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