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Silicon nanowire field effect transistor for biosensing.

机译：硅纳米线场效应晶体管用于生物传感。

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摘要

Detection and recognition of chemical ions and biological molecules are important in basic science as well as in pharmacology and medicine. Nanotechnology has made it possible to greatly enhance detection sensitivity through the use of nanowires, nanotubes, nanocrystals, nanocantilevers, and quantum dots as sensing platforms. In this work silicon nanowires are used as the conductance channel between the source and drain of a FET (field effect transistor) device and the biomolecular binding on the surface of nanowire modifies the conductance like a change in gate voltage. Due to the high surface-to-volume ratio and unique character of the silicon nanowires, this device has significant advantages in real-time, label-free and highly sensitive detection of a wide range of species, including proteins, nucleic acids and other small molecules. Here we present a biosensor fabricated from CMOS (complementary metal-oxide-semiconductor) compatible top-down methods including electron beam lithography. This method enables scalable manufacturing of multiple sensor arrays with high efficiency. In a systematic study of the device characteristics with different wire widths, we have found the sensitivity of the device increases when wire width decreases. By operating the device in appropriate bias region, the sensitivity of the device can be improved without doping or high temperature annealing. Not only can this device be used to detect the concentration of proteins and metabolites like urea or glucose, but also dynamic information like the dissociation constant can be extracted from the measurement. The device is also used to detect the clinically related cancer antigen CA 15.3 and shows potential application in cancer studies.
机译：化学离子和生物分子的检测和识别在基础科学以及药理学和医学中都很重要。纳米技术通过使用纳米线，纳米管，纳米晶体，纳米悬臂和量子点作为传感平台，极大地提高了检测灵敏度。在这项工作中，硅纳米线被用作FET（场效应晶体管）器件的源极和漏极之间的电导通道，纳米线表面上的生物分子结合改变了电导，就像栅极电压的变化一样。由于高的表面体积比和硅纳米线的独特特性，该设备在实时，无标记和高度灵敏地检测包括蛋白质，核酸和其他小分子在内的各种物种方面具有显着优势分子。在这里，我们介绍了一种由兼容CMOS（互补金属氧化物半导体）的自上而下方法（包括电子束光刻）制造的生物传感器。该方法使得能够高效地规模化制造多个传感器阵列。在对不同线宽的器件特性进行系统研究时，我们发现当线宽减小时，器件的灵敏度会提高。通过在适当的偏置区域中操作该器件，可以在不进行掺杂或高温退火的情况下提高器件的灵敏度。该设备不仅可以用于检测蛋白质和代谢物（如尿素或葡萄糖）的浓度，而且还可以从测量中提取诸如解离常数的动态信息。该设备还用于检测临床相关的癌症抗原CA 15.3，并显示出在癌症研究中的潜在应用。

著录项

  • 作者

    Chen, Yu.;

  • 作者单位

    Boston University.;

  • 授予单位 Boston University.;
  • 学科 Physics Condensed Matter.;Biophysics General.
  • 学位 Ph.D.
  • 年度 2009
  • 页码 122 p.
  • 总页数 122
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 生物物理学;
  • 关键词

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