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Probe reconfigurable phase change material switches.

机译：探头可重新配置的相变材料开关。

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摘要

Phase change (PC) chalcogenide materials are utilized as signal switches in electronic systems as an alternative to conventional transistors. Switching between two electrical resistance levels in the material is realized by atomic force microscopy (AFM) -type probes. A three-terminal electronic switch using PC materials in reconfigurable radio frequency (RF) inductors is demonstrated in this switch topology.;We present the design and modeling approach to characterize the electrical and thermal properties of PC material switches. Analysis of the RF performance focuses on minimizing degradation of self-resonance frequency and inductor quality factor. Thermal analysis focuses on realizing reversible transformation by subdividing the switch. This reduces power and current to acceptable levels as well as increases the cooling speed of each sub-via.;This work also includes examination of the electrical/thermal contact between conductive probes and metals using a conductive-AFM system. The current limitations of conductive probes with a focus on mechanical stress, thermal contact resistance, and electromigration are examined. With this understanding of electrical and thermal phenomena at tip point contacts, electrical properties of PC materials are examined. Fabrication details are also presented with respect to unique requirements of test structures for PC materials. At the device level, PC switches are demonstrated in reconfigurable inductors, and are switched between high and low resistance states, showing an off/on resistance ratio of approximately 100x.
机译：相变（PC）硫族化物材料被用作电子系统中的信号开关，以替代传统晶体管。通过原子力显微镜（AFM）型探针可实现材料中两个电阻级别之间的切换。在此开关拓扑中演示了在PC的可重配置射频（RF）电感器中使用PC材料的三端电子开关。我们提出了设计和建模方法来表征PC材料开关的电气和热性能。射频性能分析的重点是最小化自谐振频率和电感品质因数的下降。热分析的重点是通过细分开关来实现可逆转换。这样可以将功率和电流降低到可接受的水平，并提高每个子通孔的冷却速度。该工作还包括使用导电AFM系统检查导电探针和金属之间的电/热接触。检查了导电探针的电流限制，重点是机械应力，热接触电阻和电迁移。了解了尖端触点的电和热现象后，便检查了PC材料的电性能。还提供了有关PC材料测试结构的独特要求的制造细节。在设备级别，PC开关在可重配置电感器中得到了演示，并且在高阻状态和低阻状态之间切换，显示的开/关电阻比约为100倍。

著录项

  • 作者

    Lo, Hsinyi.;

  • 作者单位

    Carnegie Mellon University.;

  • 授予单位 Carnegie Mellon University.;
  • 学科 Engineering Mechanical.
  • 学位 Ph.D.
  • 年度 2009
  • 页码 143 p.
  • 总页数 143
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 机械、仪表工业;
  • 关键词

  • 入库时间 2022-08-17 11:38:29

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