• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文学位 >Characterization and application of piezoelectric microcantilever sensors fabricated from substrate-free PMN-PT layers.
【24h】

Characterization and application of piezoelectric microcantilever sensors fabricated from substrate-free PMN-PT layers.

机译：由无基板PMN-PT层制成的压电微悬臂梁传感器的特性和应用。

获取原文
获取原文并翻译 | 示例
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Piezoelectric Microcantilever Sensor (PEMS) has attracted tremendous attention and numerous biological and chemical detections have been demonstrated. During detection, adsorption induced surface stress causes the PEMS flexural resonance frequency shift, however, the sensing mechanism due to stress effect is still unclear. The goal of this dissertation is to carry out fundamental study of sensing mechanism and then demonstrate chemical warfare agent detection. When a PEMS is subject to a DC bias field, the flexural resonance frequency shifted as a result of Young's modulus change in the PMN-PT layer which was confirmed by the measurement of width mode frequency and the relative dielectric constant measurement indicated that the Young's modulus change was a result of non-180° domain switching. Similarly, the flexural resonance frequency shift of a PEMS during humidity detection was also due to the Young's modulus change which was two-order-of-magnitude larger than could be accounted for by the mass loading alone. Furthermore, a negative DC field of -6 kV/cm enhanced the relative resonance frequency shift in humidity detection by more than 3 times of the detection without a DC bias. It was shown that during humidity detection, the frequency shift of the flexural mode, Deltaf, was inversely proportional to the square of the PEMS length, L 2; relative resonance frequency shift, Deltaf/f, was inversely proportional to the PEMS thickness, t; and the mass detection sensitivity, Delta f/Deltam, was inversely proportional to wL3 where w is the width.;The Young's modulus change and scaling were validated in another independent system-DMMP detection using SAM MUA/Cu2+ coated PEMS. In addition, the flexural frequency shift of the microporous silica powder coated PEMS followed mass loading model while the planar MPS coated PEMS showed two-order-of-magnitude enhancement indicating a continuous coating of adsorbent on PEMS is desired.;Array PMN-PT/Cu PEMSs coated with planar MPS, SAM MUA/Cu2+, and no coating as control can be used to selectively detect DMMP at room temperature. Other gas species such as acetone and ammonia were examined as well using the same array. The resonance frequency shifts of the array PEMSs exhibited a unique pattern in response to DMMP and the detection can be achieved in less than 5 minutes.
机译：压电微悬臂梁传感器（PEMS）引起了极大的关注，并且已经证明了许多生物和化学检测方法。在检测过程中，吸附引起的表面应力会导致PEMS弯曲共振频率偏移，但是，由于应力作用而引起的传感机制仍不清楚。本文的目的是对传感机理进行基础研究，然后证明化学战剂的检测。当PEMS受到DC偏置电场时，弯曲谐振频率由于PMN-PT层中杨氏模量的变化而发生偏移，这由宽度模式频率的测量和相对介电常数测量结果表明，杨氏模量更改是非180°域切换的结果。同样，在湿度检测过程中，PEMS的挠曲共振频率偏移也归因于杨氏模量变化，该杨氏模量变化比单独的质量载荷所能解释的大两个数量级。此外，-6 kV / cm的负DC场将湿度检测中的相对共振频率偏移提高了三倍以上，而没有DC偏置时的相对共振频率偏移。结果表明，在湿度检测过程中，弯曲模式的频移Deltaf与PEMS长度L 2的平方成反比。相对共振频率偏移Deltaf / f与PEMS厚度t成反比；质量检测灵敏度Delta f / Deltam与wL3成反比，其中w为宽度。杨氏模量变化和结垢在另一种使用SAM MUA / Cu2 +涂层的PEMS的独立系统DMMP检测中得到验证。此外，微孔二氧化硅粉末涂覆的PEMS的挠曲频移遵循质量加载模型，而平面MPS涂覆的PEMS表现出两个数量级的增强，表明需要在PEMS上连续涂覆吸附剂。涂有平面MPS，SAM MUA / Cu2 +且没有涂层作为对照的Cu PEMS可用于在室温下选择性检测DMMP。使用相同的阵列也检查了其他气体种类，例如丙酮和氨气。响应于DMMP，阵列PEMS的共振频率偏移表现出独特的模式，并且可以在不到5分钟的时间内完成检测。

著录项

  • 作者

    Zhu, Qing.;

  • 作者单位

    Drexel University.;

  • 授予单位 Drexel University.;
  • 学科 Engineering Materials Science.
  • 学位 Ph.D.
  • 年度 2009
  • 页码 215 p.
  • 总页数 215
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 工程材料学;
  • 关键词

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号