Based on electromechanical coupling effects , the sensitivity of nucro-cantilever was researched by numerical simulation, providing theoretical basis and reference8 for further developing high-powered and high sensitivity micro-cantilever sensors. A piezoelectric microcantilever working on dynamic mode was pmposed for ultra-small mass detection by measuring its resonation frequency shift before and after mass adsorption. Based on the vibration theoretical model of micro-camilever, the theoretical analysis was focused on the relation between the resonance frequency and structural parameters of itself, Lhe relation between cantilever sensitivity and resonance frequency shift , the mass of detected matter. The effect of length , width , and resonance mode on the mass detection sensitivity of the piezoelectric cantilever were studied systematically. According to the research work on OPCM piezoelectric material.vertical vibration OPCM model is advanced, and The numerical simulation result shows that OPCM has higher sensitivity than PZT cantilever.%基于力-电双向耦合理论,采用有限元方法,数值模拟研究压电微悬臂梁的灵敏度,并进行参数分析,为设计性能优良的悬臂梁提供理论依据.理论分析微悬臂梁在空气和液体中的共振频率和自身结构参数的定量关系,灵敏度与共振频率变化量、被测物质量的关系,通过数值模拟得到悬臂梁长度、宽度、厚度及共振阶数对微质量检测压电悬臂梁灵敏度的影响.在长期研究OPCM压电传感材料的基础上,进一步提出纵向振动的OPCM材料制作悬臂梁,数值模拟结果表明OPCM比PZT悬臂梁具有更高的灵敏度.数值模拟结果为设计性能优良的悬臂梁提供理论依据.
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