多面体笼型倍半硅氧烷( POSS)由O-Si-O链接的纳米尺寸的笼型无机芯[(SiO1.5)n]和外围有机取代基团(活性或惰性)组成,这种独特的结构为杂化功能材料的制备提供了重要的平台与基础.本文从低介电材料结构对其件能的影响以及低介电性能的形成机理等方面综述了低介电材料的制备方法,尤其是POSS在低介电材料控制制备的研究进展,为该领域新材料的设计提供借鉴.%Polyhedral oligosilsesquioixanes(POSS) is a nanosized organic-inorganic hybrid molecule, which consists of a well-defined cage-like nano inorganic core[ (SiO1.5) ? ] surrounded by organic corner groups. The unique structure of POSS molecules provide an important platform for controllable preparation of hybrid nano-composites in molecular level dispersion. In this paper, the influence of hybrid molecular structure on properties and forming mechanism of low dielectric constant, in particular, the research progress of POSS-based nanocomposite low dielectric constant materials were summarized.
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