利用隔振原理,设计了矢量水声传感器系统中一种新型隔振封装结构模型,即加入橡胶减振器的新型封装结构。采用ANSYS软件对封装模型进行模态分析,研究模型结构和几何尺寸对其隔振性能的影响,确定最优隔振封装结构;对模型的几何尺寸及橡胶隔震材料力学参数进行优化,并对优化模型的隔振性能进行实验测试和评估。实验结果表明:所设计的新型橡胶减振结构具有一定的减振效果,隔离了一定程度的核心器件以外的外界振动干扰,提高了原有封装结构矢量水听器的探测灵敏度。再次验证了硅微MEMS仿生矢量水声传感器不但体积小、质量轻、结构简单,而且具有低频灵敏度高等优点。%One kind of anti-shock packaging model for the bionic vector acoustic hydrophone in the acoustic sensor system have been built by using of anti-shock principle. A new package model has been designed by adding a new rubber damper package. The modal analyses have been made to study on the structure and dimension effects on the anti-shock performance of the model so as to select the optimum packaging structure,and the optimum packaging mod-el with the lowest natural frequencies has been gained by optimizing the dimension of the model and material parame-ters of the rubber by using ANSYS. In the end,the anti-shock performance of the optimum model has been tested and evaluated. Experimental results show that the designed rubber damping structure has a certain damping effect and Isolated a certain level of external vibration disturbances outside the core device. Moreover,it improved the detection sensitivity of original packaging structure vector hydrophone. The verified MEMS silicon micro-bionic underwater a-coustic vector sensor is not only small size,light weight,simple structure,and has a low frequency and high sensitivity.
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