MEMS 仿生矢量水听器应用于水下环境，必须解决透声，绝缘，流激噪声抑制等问题。为此，提出“三明治”式封装结构。完成了“三明治”式封装结构设计计算与试制测试；并通过典型使用环境试验验证该封装结构的流激噪声抑制能力。试验结果表明：该封装结构在几乎不损失灵敏度和矢量性的前提下，比前期的封装结构在抑制流激噪声能力方面提高20 dB 以上。%The problem about sound transmission,insulation and flow noise control must be solved when MEMS vector hydrophone be used in water.Therefore a “sandwich”-type package structure for MEMS vector hydrophone was put forward to solve these problems,the design,simulation,manufac-ture,and testing works had been fulfilled.The flow-induced noise immunity of the package structure was verified by using typical environmental testing.The experimental results of MEMS vector hydro-phone with “sandwich”-type package in typical application environment showed that the ability of flow noise control of new structure is 20 dB higher than the current package structure,and no loss for sensi-tivity and directional character.
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