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首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >Wide-frequency-bandwidth whisker-inspired MEMS vector hydrophone encapsulated with parylene
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Wide-frequency-bandwidth whisker-inspired MEMS vector hydrophone encapsulated with parylene

机译：聚对二甲苯封装的宽频晶须式MEMS矢量水听器

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摘要

In order to eliminate polyurethane hat resonance frequency intervention and reduce fluid influence, a whisker-inspired MEMS vector hydrophone (WIVH) encapsulated with parylene is proposed to broaden frequency bandwidth and improve sensitivity-frequency response performance, compared to the lateral line-inspired MEMS vector hydrophone (LLIVH). Parylene that is conformally deposited on the device surface replaces polyurethane encapsulating hat and silicone oil existing in current encapsulation technology. The main advantage of WIVH as demonstrated by modelling and characterization is the enhanced bandwidth response, which is the critical factor in hydrophone design. Acoustic pressure gradient properties of the WIVH and LLIVH are analyzed to demonstrate the influence of the polyurethane hat. The interactions of the parylene membrane with fluid and the influences on vibrating performance are also investigated. Resonance measurement and sensitivity-frequency response analysis demonstrate the frequency bandwidth of the WIVH could be extended twice compared to that of the LLIVH. Moreover, the WIVH is proved to act as a typical pressure gradient hydrophone with an increment of 6 dB per octave in the linear region.
机译：为了消除聚氨酯帽共振频率干扰并减少流体影响，与侧线启发式MEMS矢量相比，提出了一种用聚对二甲苯封装的晶须式MEMS矢量水听器（WIVH），以扩大频率带宽并改善灵敏度-频率响应性能。水听器（LLIVH）。保形地沉积在设备表面的聚对二甲苯取代了现有封装技术中现有的聚氨酯封装帽和硅油。通过建模和表征证明，WIVH的主要优势是增强了带宽响应，这是水听器设计的关键因素。分析了WIVH和LLIVH的声压梯度特性，以证明聚氨酯帽的影响。还研究了聚对二甲苯膜与流体的相互作用以及对振动性能的影响。谐振测量和灵敏度-频率响应分析表明，与LLIVH相比，WIVH的频率带宽可以扩展两倍。此外，事实证明，WIVH可以充当典型的压力梯度水听器，在线性区域每八度音程增加6 dB。

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