A high precision displacement measuring system is designed by using a capacitive displacement sensor,which carries on non-contact measurement in a certain machine tool spindle's thermal deformation. System's fundamental and data processing methods have been illustrated through the analysis of object's features. The factor of influenced sensor's measurement accuracy and stability is analyzed as well. Then a technical means to utilizing electronic and digital signal filtering technology has been proposed for enhancing accuracy of sensors. It provides an alternative technological approach for machine tool spindle's high precision on non-contact measurement. After a long period of trial analysis and system calibration, the resolution of the whole measuring system comes up to 30 nm, and linearity is superior. The requirement of withdrawing precision machine tool in processing spindle thermal deformation's properties is satisfied, and the measurement system also provides a meaningful reference to capacitive displacement sensor in a similar application of non-contact high precision measurement.%利用电容式传感器,设计一个高精度位移测量系统,对机床主轴的热变形量进行非接触式测量.根据被测对象的特点,阐明了系统的工作原理和数据的处理方法,分析了影响传感器测量精度、稳定性的因素,提出了利用电子学技术和数字信号滤波技术提高传感器精度的技术手段,为机床主轴热变形的高精度、非接触式测量提供了一种技术途径.经长时间实验分析和系统标定,测量系统的精度可达到纳米级,线性度较好,满足了精密机床加工中对主轴热变形特性提取的要求,为电容式位移传感器在类似非接触式、高精度测量中的应用提供了有意义的参考.
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