介绍了基于梳状、梁式、圆盘三种结构的射频微机电系统( RF-MEMS)谐振器及滤波器,并对RF-MEMS谐振器及滤波器的结构与性能参数进行讨论；分析RF-MEMS谐振器及滤波器设计和制造中的有关问题及其处理方法;RF-MEMS谐振器及滤波器性能优异,能与其他器件实现片上集成,且与集成电路工艺兼容,在射频无线通信系统中的应用有着良好前景.%RF-MEMS resonators and filters which based on the comb, beam and disk structures are introduced. The parameters of structure and performance of several RF-MEMS resonators and filters are discussed. The related problems and its handling techniques of RF-MEMS resonators and filters in the design and manufacture process are analyzed. RF-MEMS resonators and filters have excellent performance, can be integrated with other circuit components on a chip, and be compatible with integrated circuit process, would be used in the radio frequency communication systems.
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