阐述一种非平面直写式光刻的电控系统、工作原理及组成，通过高效的控制方法，提高控制精度，实现工艺要求。%This paper w ill elaborate control system of a kind of non planar direct w rite lithography, introduced the w orking principle of non planar direct w rite lithography,the com position of control system ,the control m ethod is efficient,and im prove the control accuracy,the realization of the process requirem ents.
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