In the precision optics process, diamond grinding wheel is widely used for precision grinding of various hard and brittle materials. In order to improve the surface quality and subsurface damage of the optical parts, great efforts were made in improving the manufacture of diamond grinding wheel and the grinding process of various brittle optical materials. The structure, fixing mode, combined material and main body of diamond grinding wheels were summarized. The static balancing and dynamic balancing of diamond grinding wheel were analyzed. Ultra precision grinding element with Rt<1 μm, Ra<0. 3 μm was manufactured with this method. It is proved that this method can significantly improve the efficiency of following process.%在精密光学加工中,金刚石砂轮被广泛应用于精磨各种硬脆性材料.为了提高光学零件的表面质量,降低亚表面损伤,精密金刚石砂轮的制造及其光学加工工艺受到广泛的关注.综述了金刚石砂轮的结构、装夹方式、结合剂及基体的选用情况,对金刚石砂轮的静平衡和动平衡进行了分析,并提出了解决方案,运用该方案加工出的非球面零件面形精度Rt＜1 μm,Ra＜0.3 μm.实践证明,运用该方法加工出的零件达到了超精磨的水平,大大提高了后道工序的加工效率.
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