To fabricate microstructures using high viscosity composites, an integral stereo-lithography (SL) system adopting a digital micro-mirror device (DMD) as its dynamic mask was developed, which employed our novel resin vat and coating system. It shows that the lateral resolution of the SL system is determined by the optical resolution and the chemical response of the photo curable resin, the lateral resolution of the SL system is decreased as the curing depth goes beyond a critical value. The measured values of the optical system's resolution and the resin's working curve indicate that the maximum lateral resolution of the SL system is 14 jitn.%基于数字微反射镜的动态掩膜面投影微立体光刻技术是一种基于快速原型制造思想的新型微细结构加工手段,其系统中常用树脂槽和涂覆装置使得其无法适用于粘度大的固化材料.为实现粘度大的复合纳米材料的固化制造,构建了新型的基于数字微反射镜技术的动态掩膜微立体光刻系统,该系统的加工横向分辨率由系统的光学分辨率与树脂特性共同决定.当单层树脂固化厚度超过临界值时,系统的横向分辨率将降低.根据实验中测量光学系统的分辨率以及树脂的工作曲线,得到本系统的最高横向分辨率可以达到14 μm.
展开▼
