Ni3Al-Cr thin films were deposited at 300,400,500 and 600℃ by magnetron sputtering. X-ray diffraction (XRD) and atomic force microscope were used to analysis the microstructure, and the surface morphology. The method that adopting four probe to measure the sheet resistance change during corrosion was used to analysis the corrosion resistance of the thin films. The hardness was measured by a nano indenter. The results demonstrated that the depositing temperature has much influence on microstructure, corrosion resistance, and mechanical properties. As depositing temperature increased, the crystalline size and particle size increased. Dense spherical particles were formed at 400 and 500 ℃. Unconsolidated cubic particles were formed at 300 ℃. Part particles grew excessively at 600 ℃. The thin film deposited at 400 ℃ had the best corrosion resistance and mechanical properties. Besides this, this study proved the sheet resistance method to be reliable to analysis the corrosion resistance.%通过磁控溅射分别在300、400、500和600℃下沉积了Ni3Al-Cr薄膜.采用X射线衍射(XRD)和原子力显微镜(AFM)表征了薄膜的晶体结构和表面形貌,通过方阻法检测了薄膜的抗腐蚀性能,采用纳米压痕表征了薄膜的硬度.结果表明,沉积温度对薄膜的微观结构、抗腐蚀及力学性能有重要影响.随着沉积温度的升高,薄膜晶粒及颗粒尺寸增大,300C时形成尺寸均匀的立方体小颗粒,400和500℃时颗粒长大且致密堆积,600℃时部分颗粒过度长大.在400℃沉积的薄膜兼具最优的抗腐蚀性和力学性能.证明了方阻法表征薄膜抗腐蚀性能的可靠性.
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