在酸制绒液中加入含氟表面活性剂,对多晶硅片制绒。然后通过扫描电子显微镜观察多晶硅表面织构,并在此基础上分析含氟表面活性剂对腐蚀效果的影响。实验结果表明：虽然传统酸液对多晶硅制绒是各向同性的,但加入含氟表面活性剂后,酸腐蚀出现各向异性腐蚀特性;由此制备的多晶硅片反射率从25.7%下降到了23.9%,表面出现变形的金字塔、三角形等,且不同晶面的金字塔和三角形的大小和倾斜角度不同。最后根据杨氏理论,从界面张力的角度解释了含氟表面活性剂对制绒的影响机理。%Multicrystalline Si（mc-Si） wafers were textured by fluorinated surfactant added acidic etching solution.Textured surfaces of mc-Si wafers were observed by scanning electron microscopy,and the effects of the fluorinated surfactant on the textured surfaces were investigated.Our results demonstrate that mc-Si wafers are etched isotropically by conventional acidic etching solution,but an anisotropic etching phenomenon appears when the fluorinated surfactant is added.Besides,the average reflectance of mc-Si waters decreases from 25.7% to 23.9%,the surfaces are covered with many deformed pyramids,triangles and etc,which have different sizes and different slant angles.According to Young＇s theory,we attribute the effects of the fluorinated surfactant on the microstructure of textured surfaces to interfacial tension.
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