Capacitive MEMS accelerometer is a main format in of MEMS accelerometers.This paper makes a study of the MS3110 chip,knows the performance and the method of setting parameters and uses the MS3110 chip as the interface circuit of the the capacitive MEMS sensor to detect the high-resolution micro-capacitance in this kind of sensors.The test results show that the microcapacitor readout circuit based on MS3110 has good stability and linearity.%电容式MEMS加速度计是MEMS加速度计的一种主要的形式.通过对MS3110的应用研究,了解其使用性能和参数设置方法,在此基础上将该芯片用作电容式MEMS加速度计的电容输出接口,实现对该类传感器的高分辨率微电容检测.实验结果表明,设计的基于MS3110的微电容读出电路有良好的稳定性和线性度.
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