综述了近年来国内外稀土掺杂ZnO薄膜的研究现状,总结了稀土掺杂的方式及稀土掺杂对ZnO薄膜的结构、光、电、磁学性能以及抗腐蚀性能的影响,并介绍了稀土掺杂ZnO薄膜在气敏传感器方面的应用,最后探讨了稀土掺杂ZnO薄膜存在的问题及今后可能的研究方向.%The research status of rare earth doped ZnO film at home and abroad in recent years are reviewed, the influences of rare earth and the way they doped on the properties of ZnO film are summarized, such as structure, optical, electrical, magnetic ami corrosion resistance properties. The application of rare earth doped ZnO thin films on gas sensor is also introduced. The existing problems of rare earth doped ZnO film and the possible future research area are discussed in the end.
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