研究了一种烘烤控制方法在透射电子显微镜中的应用，通过分析透射电子显微镜获得高真空的方法，提出引入物镜烘烤的必要性。对物镜烘烤的控制特点进行了详细分析，并对控制电路进行了仿真分析。经过反复测试验证，该物镜烘烤控制方法符合透射电子显微镜获得高真空工艺的控制要求。%The application of baking control method in transmission electron microscopy ( TEM) is researched, through analyzing the method of obtaining high vacuum in TEM, the necessity of objective lens baking is introduced. The control features of objective lens baking are analyzed in detail, the control circuitry is simulated and analyzed. Repeated testing and certification show that the objective lens baking control method conforms the control requirement of acquiring high vacuum technological process of TEM.
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