The transparent conductive oxide (TCO) films have the combination of good metallic conductivity and high transmittance in the visible spectra.So that these films were widely used in thin films solar cells,OLED,LCDs,and all types of automotive environments (such as ice-free Low-E coated,switchable sun-control and privacy glazing,etc).The well-known In2O3 based films are the most intense researched in nowadays.But people turn to the ZnO based films because of the lack and the high price of In material.This paper reports the development of the producing technique and annealing properties in laboratories.%透明导电氧化物(TCO)金属导电性良好,可见光透过率较高,广泛应用于薄膜太阳能电池,OLED,LCDs,以及各种汽车应用(如防冻低热导率涂层、光控隐私玻璃等).目前In2O3基薄膜的研究最为成熟,然而因为In材料稀有昂贵,越来越多的人转而研究ZnO基薄膜.本文报告ZnO基薄膜的研究现状.
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