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首页> 美国卫生研究院文献>Materials >Vibration-Assisted Femtosecond Laser Drilling with Controllable Taper Angles for AMOLED Fine Metal Mask Fabrication
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Vibration-Assisted Femtosecond Laser Drilling with Controllable Taper Angles for AMOLED Fine Metal Mask Fabrication

机译：具有可控锥角的振动辅助飞秒激光钻孔用于AMOLED精细金属掩模的制造

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摘要

This study investigates the effect of focal plane variation using vibration in a femtosecond laser hole drilling process on Invar alloy fabrication quality for the production of fine metal masks (FMMs). FMMs are used in the red, green, blue (RGB) evaporation process in Active Matrix Organic Light-Emitting Diode (AMOLED) manufacturing. The taper angle of the hole is adjusted by attaching the objective lens to a micro-vibrator and continuously changing the focal plane position. Eight laser pulses were used to examine how the hole characteristics vary with the first focal plane’s position, where the first pulse is focused at an initial position and the focal planes of subsequent pulses move downward. The results showed that the hole taper angle can be controlled by varying the amplitude of the continuously operating vibrator during femtosecond laser hole machining. The taper angles were changed between 31.8° and 43.9° by adjusting the vibrator amplitude at a frequency of 100 Hz. Femtosecond laser hole drilling with controllable taper angles is expected to be used in the precision micro-machining of various smart devices.
机译：这项研究调查了飞秒激光钻孔过程中使用振动的焦平面变化对殷钢合金制造质量（用于生产精细金属掩模（FMM））的影响。 FMM用于有源矩阵有机发光二极管（AMOLED）制造中的红色，绿色，蓝色（RGB）蒸发过程。通过将物镜安装到微振子上并连续改变焦平面位置，可以调节孔的锥角。八个激光脉冲用于检查空穴特性如何随第一个焦平面的位置变化，第一个脉冲聚焦在初始位置，随后的脉冲的焦平面向下移动。结果表明，在飞秒激光孔加工过程中，可以通过改变连续运行的振子的振幅来控制孔锥角。通过以100Hz的频率调节振动器振幅，在31.8°和43.9°之间改变锥角。具有可控锥角的飞秒激光钻孔有望用于各种智能设备的精密微加工。

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