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首页> 美国卫生研究院文献>Microsystems Nanoengineering >Multifrequency excitation of a clamped–clamped microbeam: Analytical and experimental investigation
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Multifrequency excitation of a clamped–clamped microbeam: Analytical and experimental investigation

机译：夹钳微束的多频激励：分析和实验研究

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摘要

Using partial electrodes and a multifrequency electrical source, we present a large-bandwidth, large-amplitude clamped–clamped microbeam resonator excited near the higher order modes of vibration. We analytically and experimentally investigate the nonlinear dynamics of the microbeam under a two-source harmonic excitation. The first-frequency source is swept around the first three modes of vibration, whereas the second source frequency remains fixed. New additive and subtractive resonances are demonstrated. We illustrated that by properly tuning the frequency and amplitude of the excitation force, the frequency bandwidth of the resonator is controlled. The microbeam is fabricated using polyimide as a structural layer coated with nickel from the top and chromium and gold layers from the bottom. Using the Galerkin method, a reduced order model is derived to simulate the static and dynamic response of the device. A good agreement between the theoretical and experimental data are reported.
机译：使用局部电极和多频电源，我们提出了在高阶振动模式附近激发的大带宽，大幅度钳位-钳位微束谐振器。我们通过分析和实验研究在双源谐波激励下微束的非线性动力学。第一频率源绕前三种振动模式扫掠，而第二频率源保持固定。证明了新的加减共振。我们说明了通过适当调整激励力的频率和幅度，可以控制谐振器的频率带宽。使用聚酰亚胺作为结构层制造微束，该结构层的顶部是镍，底部是铬和金。使用Galerkin方法，可以导出降阶模型来模拟设备的静态和动态响应。据报道理论和实验数据之间的良好协议。

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