Silicon Carbide-Based Hydrogen Gas Sensors for High-Temperature Applications

机译：用于高温应用的基于碳化硅的氢气传感器

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摘要

We investigated SiC-based hydrogen gas sensors with metal-insulator-semiconductor (MIS) structure for high temperature process monitoring and leak detection applications in fields such as the automotive, chemical and petroleum industries. In this work, a thin tantalum oxide (Ta2O5) layer was exploited with the purpose of sensitivity improvement, because tantalum oxide has good stability at high temperature with high permeability for hydrogen gas. Silicon carbide (SiC) was used as a substrate for high-temperature applications. We fabricated Pd/Ta2O5/SiC-based hydrogen gas sensors, and the dependence of their I-V characteristics and capacitance response properties on hydrogen concentrations were analyzed in the temperature range from room temperature to 500 °C. According to the results, our sensor shows promising performance for hydrogen gas detection at high temperatures.

机译：我们研究了具有金属-绝缘体-半导体（MIS）结构的SiC基氢气传感器，用于汽车，化学和石油工业等领域的高温过程监控和泄漏检测应用。在这项工作中，出于提高灵敏度的目的，开发了薄的氧化钽（Ta2O5）层，因为氧化钽在高温下具有良好的稳定性，并且对氢气具有高渗透性。碳化硅（SiC）用作高温应用的基材。我们制造了基于Pd / Ta2O5 / SiC的氢气传感器，并在室温至500°C的温度范围内分析了它们的I-V特性和电容响应特性对氢气浓度的依赖性。根据结果，我们的传感器在高温氢气检测方面显示出令人鼓舞的性能。

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期刊名称 Sensors (Basel Switzerland)
作者
Seongjeen Kim; Jehoon Choi; Minsoo Jung; Sungjae Joo; Sangchoel Kim;
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作者单位

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年(卷),期 2013(13),10
年度 2013
页码 13575–13583
总页数 9
原文格式 PDF
正文语种
中图分类
关键词
hydrogen sensor high temperature SiC Ta2O5 MIS structure;

机译：氢传感器;高温;SiC;Ta2O5;MIS结构;

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1. Silicon-on-insulator-based high-voltage, high-temperature integrated circuit gate driver for silicon carbide-based power field effect transistors [J] . Huque M.A., Tolbert L.M., Blalock B.J., Power Electronics, IET . 2010,第6期

机译：基于绝缘体上硅的高压高温集成电路栅极驱动器，用于基于碳化硅的功率场效应晶体管
2. An adhesive bonding approach by hydrogen silsesquioxane for silicon carbide-based LED applications [J] . Lin Li, Ou Yiyu, Jokubavicius Valdas, Materials science in semiconductor processing . 2019,第期

机译：基于碳化硅的LED应用的氢倍半硅氧烷粘合剂粘合方法
3. Investigation of doped-gadolinium zirconate nanomaterials for high-temperature hydrogen sensor applications [J] . Christina Wildfire, Engin ?iftyürek, Katarzyna Sabolsky, Journal of Materials Science . 2014,第14期

机译：用于高温氢传感器的掺杂z酸锆纳米材料的研究
4. Post Implantation Treatment of Silicon Carbide-Based Sensors for Hydrogen Detection Properties Enhancement [C] . I.C. Muntele, C.IM. Muntele, D. Ila Materials Research Society Symposium . 2001

机译：基于碳化硅传感器的后植入处理性能增强
5. Investigation of Gadolinium Based Pyrochlores for their use in High-Temperature Nano-Derived Hydrogen Gas Sensors. [D] . Wildfire, Christina. 2012

机译：of基烧绿石在高温纳米衍生氢气传感器中的应用研究。
6. An Improved Metal-Packaged Strain Sensor Based on A Regenerated Fiber Bragg Grating in Hydrogen-Loaded Boron–Germanium Co-Doped Photosensitive Fiber for High-Temperature Applications [O] . Yun Tu, Lin Ye, Shao-Ping Zhou, 2017

机译：一种改进的基于再生光纤布拉格光栅的含氢硼-锗共掺杂光敏光纤中的金属包装应变传感器用于高温应用
7. Silicon Carbide-Based Hydrogen Gas Sensors for High-Temperature Applications [O] . Sangchoel Kim, Jehoon Choi, Minsoo Jung, 2013

机译：用于高温应用的碳化硅基氢气传感器

Silicon Carbide-Based Hydrogen Gas Sensors for High-Temperature Applications

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