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首页> 美国卫生研究院文献>Sensors (Basel Switzerland) >Strategy toward Miniaturized Self-out-Readable Resonant Cantilever and Integrated Electrostatic Microchannel Separator for Highly Sensitive Airborne Nanoparticle Detection
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Strategy toward Miniaturized Self-out-Readable Resonant Cantilever and Integrated Electrostatic Microchannel Separator for Highly Sensitive Airborne Nanoparticle Detection

机译：小型化自读出可读共振悬臂和集成静电微通道分离器的策略用于高灵敏度机载纳米颗粒检测

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摘要

In this paper, a self-out-readable, miniaturized cantilever resonator for highly sensitive airborne nanoparticle (NP) detection is presented. The cantilever, which is operated in the fundamental in-plane resonance mode, is used as a microbalance with femtogram resolution. To maximize sensitivity and read-out signal amplitude of the piezo-resistive Wheatstone half bridge, the geometric parameters of the sensor design are optimized by finite element modelling (FEM). The electrical read-out of the cantilever movement is realized by piezo-resistive struts at the sides of the cantilever resonator that enable real-time tracking using a phase-locked loop (PLL) circuit. Cantilevers with minimum resonator mass of 1.72 ng and resonance frequency of ~440 kHz were fabricated, providing a theoretical sensitivity of 7.8 fg/Hz. In addition, for electrostatic NP collection, the cantilever has a negative-biased electrode located at its free end. Moreover, the counter-electrode surrounding the cantilever and a µ-channel, guiding the particle-laden air flow towards the cantilever, are integrated with the sensor chip. µ-channels and varying sampling voltages will also be used to accomplish particle separation for size-selective NP detection. To sum up, the presented airborne NP sensor is expected to demonstrate significant improvements in the field of handheld, micro-anoelectromechanical systems (M/NEMS)-based NP monitoring devices.
机译：在本文中，提出了一种用于高度灵敏的机载纳米颗粒（NP）检测的自可读，微型悬臂谐振器。以基本面内共振模式运行的悬臂用作具有飞克分辨率的微量天平。为了使压阻惠斯通电桥的灵敏度和读出信号幅度最大化，通过有限元建模（FEM）优化了传感器设计的几何参数。悬臂运动的电读出是通过悬臂谐振器侧面的压阻支柱实现的，该支柱可使用锁相环（PLL）电路进行实时跟踪。制造了最小谐振器质量为1.72 ng，谐振频率为〜440 kHz的悬臂，理论灵敏度为7.8 fg / Hz。此外，对于静电NP收集，悬臂在其自由端有一个负电极。此外，围绕悬臂的反电极和一个µ通道将载有颗粒的空气流引向悬臂，与传感器芯片集成在一起。 µ通道和变化的采样电压也将用于完成颗粒分离，以进行大小选择NP检测。综上所述，所提出的机载NP传感器有望在基于手持式微/纳米机电系统（M / NEMS）的NP监测设备领域展示出显着的进步。

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