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首页> 美国卫生研究院文献>Nanoscale Research Letters >TEM and STEM Studies on the Cross-sectional Morphologies of Dual-/Tri-layer Broadband SiO2 Antireflective Films
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TEM and STEM Studies on the Cross-sectional Morphologies of Dual-/Tri-layer Broadband SiO2 Antireflective Films

机译：TEM / STEM研究双层/三层宽带SiO2减反射膜的截面形态

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摘要

Dual-layer and tri-layer broadband antireflective (AR) films with excellent transmittance were successfully fabricated using base-/acid-catalyzed mixed sols and propylene oxide (PO) modified silica sols. The sols and films were characterized by scanning electron microscope (SEM), Fourier transform infrared spectroscopy (FTIR), nuclear magnetic resonance (NMR), transmission electron microscope (TEM), and scanning transmission electron microscope (STEM). FTIR and TEM results suggest that the PO molecules were covalently bonded to the silica particles and the bridge structure existing in PO modified silica sol is responsible for the low density of the top layer. The density ratio between different layers was measured by cross-sectional STEM, and the results are 1.69:1 and 2.1:1.7:1 from bottom-layer to top-layer for dual-layer and tri-layer films, respectively. The dual-layer film demonstrates good stability with 99.8% at the central wavelength of 351 nm and nearly 99.5% at the central wavelength of 1053 nm in laser system, and for the tri-layer AR film, the maximum transmittance reached nearly 100% at both the central wavelengths of 527 and 1053 nm.
机译：使用碱/酸催化的混合溶胶和环氧丙烷（PO）改性的二氧化硅溶胶成功地制备了具有优异透射率的双层和三层宽带减反射膜。通过扫描电子显微镜（SEM），傅里叶变换红外光谱（FTIR），核磁共振（NMR），透射电子显微镜（TEM）和扫描透射电子显微镜（STEM）对溶胶和薄膜进行表征。 FTIR和TEM结果表明，PO分子与二氧化硅颗粒共价键合，而PO改性的二氧化硅溶胶中存在的桥结构导致顶层的低密度。通过截面STEM测量不同层之间的密度比，对于双层膜和三层膜，从底层到顶层的结果分别为1.69：1和2.1：1.7：1。双层膜表现出良好的稳定性，在激光系统中中心波长为351nm时为99.8％，在1053nm中心波长时为近99.5％，对于三层AR膜，最大透射率在260nm下达到近100％中心波长分别为527和1053 nm。

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