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Transparent SiON/Ag/SiON multilayer passivation grown on a flexible polyethersulfone substrate using a continuous roll-to-roll sputtering system

机译：使用连续卷对卷溅射系统在柔性聚醚砜基板上生长的透明SiON / Ag / SiON多层钝化层

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We have investigated the characteristics of a silicon oxynitride/silver/silicon oxynitride [SiON/Ag/SiON] multilayer passivation grown using a specially designed roll-to-roll [R2R] sputtering system on a flexible polyethersulfone substrate. Optical, structural, and surface properties of the R2R grown SiON/Ag/SiON multilayer were investigated as a function of the SiON thickness at a constant Ag thickness of 12 nm. The flexible SiON/Ag/SiON multilayer has a high optical transmittance of 87.7% at optimized conditions due to the antireflection and surface plasmon effects in the oxide-metal-oxide structure. The water vapor transmission rate of the SiON/Ag/SiON multilayer is 0.031 g/m²day at an optimized SiON thickness of 110 nm. This indicates that R2R grown SiON/Ag/SiON is a promising thin-film passivation for flexible organic light-emitting diodes and flexible organic photovoltaics due to its simple and low-temperature process.

机译：我们已经研究了使用特殊设计的卷对卷[R2R]溅射系统在柔性聚醚砜基板上生长的氮氧化硅/银/氮氧化硅[SiON / Ag / SiON]多层钝化的特性。研究了R2R生长的SiON / Ag / SiON多层膜的光学，结构和表面性质，该常数是在恒定Ag厚度为12 nm时SiON厚度的函数。由于在氧化物-金属-氧化物结构中的抗反射和表面等离激元效应，在优化条件下，柔性SiON / Ag / SiON多层膜的透光率高达87.7％。在110nm的最佳SiON厚度下，SiON / Ag / SiON多层膜的水蒸气透过率为0.031 g / m ^{2 day。这表明R2R生长的SiON / Ag / SiON由于其简单且低温的工艺，成为用于柔性有机发光二极管和柔性有机光伏的有希望的薄膜钝化剂。}

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期刊名称 Nanoscale Research Letters
作者
Han-Ki Kim; Chung-Ki Cho;
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年(卷),期 2012(7),1
年度 2012
页码 69
总页数 6
原文格式 PDF
正文语种
中图分类生化遗传学;生化药理学;
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7. Transparent SiON/Ag/SiON multilayer passivation grown on a flexible polyethersulfone substrate using a continuous roll-to-roll sputtering system [O] . Han-Ki Kim, Chung-Ki Cho 2012

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Transparent SiON/Ag/SiON multilayer passivation grown on a flexible polyethersulfone substrate using a continuous roll-to-roll sputtering system

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