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Electrothermal Microactuators With Peg Drive Improve Performance for Brain Implant Applications

机译：具有PEG驱动器的电热微致动力提高脑植入应用的性能

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This paper presents a new actuation scheme for in-plane bidirectional translation of polysilicon microelectrodes. The new Chevron-peg actuation scheme uses microelectromechanical systems (MEMS) based electrothermal microactuators to move microelectrodes for brain implant applications. The design changes were motivated by specific needs identified by the in vivo testing of an earlier generation of MEMS microelectrodes that were actuated by the Chevron-latch type of mechanism. The microelectrodes actuated by the Chevron-peg mechanism discussed here show improved performance in the following key areas: higher force generation capability (111 μN per heat strip compared to 50 μN), reduced power consumption (91 mW compared to 360 mW), and reliable performance with consistent forward and backward movements of microelectrodes. Failure analysis of the Chevron-latch and the Chevron-peg type of actuation schemes showed that the latter is more robust to wear over four million cycles of operation. The parameters for the activation waveforms for Chevron-peg actuators were optimized using statistical analysis. Waveforms with a 1-ms time period and a 1-Hz frequency of operation showed minimal error between the expected and the actual movement of the microelectrodes. The new generation of Chevron-peg actuators and microelectrodes are therefore expected to enhance the longevity and performance of implanted microelectrodes in the brain.  [2011-0341]
机译：本文提出了一种多晶硅微电极面内双向平移的新驱动方案。新的Chevron-peg致动方案使用基于微机电系统（MEMS）的电热微致动器来移动微电极，以用于脑植入应用。设计更改的动机是通过对由Chevron-latch型机构驱动的较早一代MEMS微电极进行的体内测试，确定了特定的需求。此处讨论的Chevron-peg机构致动的微电极在以下关键领域表现出更高的性能：更高的力产生能力（每个热条111μN，而50μN），降低的功耗（91 mW与360 mW之间）微电极前后一致的运动性能。对Chevron-latch和Chevron-peg类型的致动方案进行的故障分析表明，后者在经过400万次操作循环后更加坚固。 Chevron-peg执行器的激活波形参数已使用统计分析进行了优化。 1 ms的时间周期和1 Hz的操作频率的波形显示微电极的预期运动与实际运动之间的误差最小。因此，新一代的Chevron-peg致动器和微电极有望增强大脑中植入的微电极的寿命和性能。 [2011-0341]

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