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Controllable Synthesis of Vertically Aligned p-Type GaN Nanorod Arrays on n-Type Si Substrates for Heterojunction Diodes

机译:用于异质结二极管的n型硅衬底上可垂直定向排列的p型GaN纳米棒阵列的可控合成

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摘要

A new catalyst seeding method is presented, in which aerosolized catalyst nanoparticles are continuously self-assembled onto amine-terminated silicon substrates in gas phase to realize controllable synthesis of vertically aligned Mg-doped GaN nanorod arrays on n-type Si (111) substrates. The diameter, areal density, and length of GaN nanorods can be controlled by adjusting the size of Au nanoparticles, flowing time of Au nanoparticles, and growth time, respectively. Based on the synthesis of p-type GaN nanorods on n-type Si substrates, p-GaN nanorod-Si heterojunction diodes are fabricated, which exhibit well-defined rectifying behavior with a low turn-on voltage of ~1.0 V and a low leakage current even at a reverse bias up to 10 V. The controllable growth of GaN nanorod arrays and the realization of p-type GaN nanorod-type Si heterojunction diodes open up opportunities for low-cost and high-performance optoelectronic devices based on these nanostructured arrays.
机译:提出了一种新的催化剂注入方法,该方法将气化的催化剂纳米颗粒在气相中连续自组装到胺端基的硅衬底上,以实现在n型Si(111)衬底上垂直排列的掺Mg的GaN纳米棒阵列的可控合成。 GaN纳米棒的直径,面密度和长度可以通过分别调节Au纳米颗粒的尺寸,Au纳米颗粒的流动时间和生长时间来控制。根据在n型Si衬底上合成p型GaN纳米棒的方法,制造了p-GaN纳米棒/ n-Si异质结二极管,该二极管具有良好的整流特性,且开启电压低至约1.0 V,且具有即使在高达10 V的反向偏置下也具有低泄漏电流。GaN纳米棒阵列的可控增长以及p型GaN纳米棒/ n型Si异质结二极管的实现为基于低成本和高性能的光电器件打开了机遇在这些纳米结构阵列上。

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