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首页> 外文期刊>Applied Physics Letters >Modulation of acousto-electric current using a hybrid on-chip AIN SAW/GFET device
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Modulation of acousto-electric current using a hybrid on-chip AIN SAW/GFET device

机译：使用混合片上AIN SAW / GFET器件调制声电流

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摘要

We fabricated a hybrid on-chip acousto-electric (AE) and field-effect device to investigate the modulation of acoustic carrier transportation by gate voltage. The device fabrication exploited a surface micromachining aluminum nitride process on a silicon wafer, facilitating an integration of a surface acoustic wave (SAW) delay line and a graphene field-effect transistor. The SAW device induced an AE current in graphene, which scales linearly with the input power and remains essentially constant when subtracting the offset current at different DC biases. At a constant DC bias, the AE current can be modulated by the gate voltage, due to the change of the carrier mobility in graphene. A four-fold enhancement in the AE current was realized when ~35 V voltage was applied to the gate electrode. The highly integrated device proves to be a powerful tool to understand the AE current in graphene, and since it supports integration for versatile functionality, it opens an avenue to explore the properties of diverse nanomaterials.
机译：我们制造了一种混合式片上声电（AE）和场效应器件，以研究栅极电压对声载流子传输的调制。该器件制造在硅晶片上采用了表面微机械加工氮化铝工艺，从而促进了声表面波（SAW）延迟线和石墨烯场效应晶体管的集成。 SAW器件在石墨烯中感应出一个AE电流，该AE电流与输入功率成线性比例，并且在减去不同DC偏置下的失调电流时基本上保持恒定。在恒定的直流偏置下，由于石墨烯中载流子迁移率的变化，可以通过栅极电压调制AE电流。当向栅电极施加约35 V电压时，AE电流实现了四倍的增强。事实证明，高度集成的设备是了解石墨烯中AE电流的强大工具，并且由于它支持集成多种功能，因此它为探索各种纳米材料的特性开辟了道路。

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  • 来源
    《Applied Physics Letters》 |2017年第24期|243504.1-243504.5|共5页
  • 作者

    Ji Liang; Xing Yang; Shijun Zheng; Chongling Sun; Menglun Zhang; Hao Zhang; Daihua Zhang; Wei Pang;

  • 作者单位

    State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China;

    State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China;

    State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China;

    State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China;

    State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China;

    State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China;

    State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China;

    State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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  • 正文语种 eng
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