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Electrical, electronic and optical properties of amorphous indium zinc tin oxide thin films

机译:非晶铟锌锡氧化物薄膜的电,电和光学性质

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摘要

The electrical and optical properties of amorphous indium zinc tin oxide (a-IZTO) thin films were examined as a function of chemical composition. Effects of Sn/Zn composition ratio and In content on the electrical and optical properties of a-IZTO thin films are discussed. The electron mobility of thin film transistors with higher Sn/Zn composition ratio was dramatically improved due to a shorter zinc-zinc separation distance. The thin film transistor with the composition of In:Zn:Sn = 20:48:32 exhibits a high mobility of 30.6 cm~2 V~(-1) s~(-1) and a high on-off current ratio of 10~9.
机译:研究了非晶铟锌锡氧化物(a-IZTO)薄膜的电学和光学性质与化学成分的关系。讨论了Sn / Zn组成比和In含量对a-IZTO薄膜的电学和光学性质的影响。具有较高Sn / Zn组成比的薄膜晶体管的电子迁移率由于较短的锌-锌分离距离而得到显着改善。 In:Zn:Sn = 20:48:32的薄膜晶体管具有30.6 cm〜2 V〜(-1)s〜(-1)的高迁移率和10的高开关电流比〜9。

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  • 来源
    《Applied Surface Science》 |2014年第1期|454-458|共5页
  • 作者单位

    Department of Physics, Chungbuk National University, Cheongju 361-763, Republic of Korea,Department of Electrical Engineering, University of Sultan Ageng Tirtayasa, Banten, Serang, 42435, Indonesia;

    Department of Physics, Chungbuk National University, Cheongju 361-763, Republic of Korea;

    Department of Physics, Chungbuk National University, Cheongju 361-763, Republic of Korea;

    Department of Physics, Chungbuk National University, Cheongju 361-763, Republic of Korea;

    Department of Physics, Chungbuk National University, Cheongju 361-763, Republic of Korea;

    Department of Physics Education, Chungbuk National University, Cheongju 361-763, Republic of Korea;

    Analytical Engineering Center, Samsung Advanced Institute of Technology, Suwon 440-600, Republic of Korea;

    Analytical Engineering Center, Samsung Advanced Institute of Technology, Suwon 440-600, Republic of Korea;

    Analytical Engineering Center, Samsung Advanced Institute of Technology, Suwon 440-600, Republic of Korea;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Transparent conducting oxide; XPS; REELS; EXAFS; Electrical properties; Local structure;

    机译:透明导电氧化物;XPS;REELS;EXAFS;电气性能;局部结构;

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