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The effect of UV irradiation on nanocrysatlline zinc oxide thin films related to gas sensing characteristics

机译：紫外线辐射对纳米结晶氧化锌薄膜的影响与气敏特性的关系

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摘要

The effect of ultraviolet (UV) light irradiation on the nanocrystalline ZnO thin films was investigated. The degree of crystallinity, electrical conductivity, optical properties and surface properties of ZnO thin films were measured as a function of UV irradiation time. It was found that the degree of crystallinity and electrical properties of ZnO films were affected by UV irradiation, however, no noticeable change in the surface morphology was observed. The gas sensing properties of as-deposited and UV irradiated films were also measured. It was observed that the gas sensing properties were affected by the UV irradiation. The irradiation time less than 5 min has improved the sensor while the irradiation time more than 5 min degraded the sensor characteristics for a UV power density of 2.45 W cm~2.
机译：研究了紫外线（UV）对纳米ZnO薄膜的影响。测量ZnO薄膜的结晶度，电导率，光学性质和表面性质，作为紫外线照射时间的函数。已经发现，ZnO膜的结晶度和电性能受UV辐射的影响，但是，未观察到表面形态的明显变化。还测量了沉积膜和紫外线辐射膜的气敏特性。观察到气体感测特性受到UV辐射的影响。小于5分钟的照射时间改善了传感器，而大于5分钟的照射时间则在2.45 W cm〜2的UV功率密度下降低了传感器的性能。

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  • 来源
    《Applied Surface Science》 |2011年第12期|p.5398-5402|共5页
  • 作者

    A.M. Soleimanpour; Yue Hou; Ahalapitiya H. Jayatissa;

  • 作者单位

    Mechanical, Industrial, and Manufacturing Engineering (MIME) Department, The University of Toledo, 2801 W. Bancroft St., Toledo, OH 43606, USA;

    Mechanical, Industrial, and Manufacturing Engineering (MIME) Department, The University of Toledo, 2801 W. Bancroft St., Toledo, OH 43606, USA;

    Mechanical, Industrial, and Manufacturing Engineering (MIME) Department, The University of Toledo, 2801 W. Bancroft St., Toledo, OH 43606, USA;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    zinc oxide; thin film; gas sensor; uv irradiation; crystallinity; x-ray diffraction (xrd);

    机译：氧化锌;薄膜;气体传感器;紫外线照射;结晶度;x射线衍射（xrd）;

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