• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Applied Surface Science >Study of structural and optical properties of ZnO films grown by pulsed laser deposition
【24h】

Study of structural and optical properties of ZnO films grown by pulsed laser deposition

机译：脉冲激光沉积生长ZnO薄膜的结构和光学性质的研究

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

Wurtzite zinc oxides films (ZnO) were deposited on silicon (001) and corning glass substrates using the pulsed laser deposition technique. The laser fluence, target-substrate distance, substrate temperature of 300 ℃ were fixed while varying oxygen pressures from 2 to 500 Pa were used. It is observed that the structural properties of ZnO films depend strongly on the oxygen pressure and the substrate nature. The film crystallinity improves with decreasing oxygen pressure. At high oxygen pressure, the films are randomly oriented, whereas, at low oxygen pressures they are well oriented along [001] axis for Si substrates and along [103] axis for glass substrates. A honeycomb structure is obtained at low oxygen pressures, whereas microcrystalline structures were obtained at high oxygen pressures. The effect of oxygen pressure on film transparency, band gap E_g and Urbach energies was investigated.
机译：使用脉冲激光沉积技术将纤锌矿型氧化锌薄膜（ZnO）沉积在硅（001）和康宁玻璃基板上。在2至500 Pa的氧气压力范围内，激光通量，目标衬底距离，衬底温度为300℃是固定的。可以看出，ZnO薄膜的结构特性在很大程度上取决于氧气压力和基材性质。膜的结晶度随着氧气压力的降低而提高。在高氧气压力下，薄膜是无规取向的，而在低氧气压力下，对于Si基板，它们沿[001]轴取向良好；对于玻璃基板，则沿[103]轴取向良好。在低氧气压力下获得蜂窝结构，而在高氧气压力下获得微晶结构。研究了氧气压力对薄膜透明度，带隙E_g和Urbach能量的影响。

著录项

  • 来源
    《Applied Surface Science》 |2010年第18期|P.5650-5655|共6页
  • 作者

    S.Lemlikchi; S. Abdelli-Messaci; S. Lafane; T. Kerdja; A.Guittoum; M.Saad;

  • 作者单位

    Advanced Technology Development Centre, Cite 20 Aout 1956 BP 17 Baba Hassen, Algiers, Algeria;

    rnAdvanced Technology Development Centre, Cite 20 Aout 1956 BP 17 Baba Hassen, Algiers, Algeria;

    rnAdvanced Technology Development Centre, Cite 20 Aout 1956 BP 17 Baba Hassen, Algiers, Algeria;

    rnAdvanced Technology Development Centre, Cite 20 Aout 1956 BP 17 Baba Hassen, Algiers, Algeria;

    rnNuclear Research Centre of Algiers, 2 Bd Frantz-Fanon, Algiers, Algeria;

    rnNuclear Research Centre of Algiers, 2 Bd Frantz-Fanon, Algiers, Algeria;

  • 收录信息
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    PLD; ZnO; DRX; morphology; texture coefficient;

    机译：PLD;氧化锌;DRX;形态学;纹理系数;

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号