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首页> 外文期刊>Applied Surface Science >Deposition and characterization of TiAlSiN nanocomposite coatings prepared by reactive pulsed direct current unbalanced magnetron sputtering
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Deposition and characterization of TiAlSiN nanocomposite coatings prepared by reactive pulsed direct current unbalanced magnetron sputtering

机译：反应性脉冲直流不平衡磁控溅射制备的TiAlSiN纳米复合涂层的沉积与表征

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摘要

This work reports the performance of high speed steel drill bits coated with TiAlSiN nanocomposite coating at different Si contents (5.5-8.1 at.%) prepared using a four-cathode reactive pulsed direct current unbalanced magnetron sputtering system. The surface morphology of the as-deposited coatings was characterized using field emission scanning electron microscopy. The crystallographic structure, chemical composition and bonding structure were evaluated using X-ray diffraction, energy-dispersive X-ray analysis, X-ray photoelectron spectroscopy, respectively. The corrosion behavior, mechanical properties and thermal stability of TiAlSiN nanocomposite coatings were also studied using potentiodynamic polarization, nanoindentation and Raman spectroscopy, respectively. The TiAlSiN coating thickness was approximately 2.5-2.9 μm. These coatings exhibited a maximum hardness of 38 GPa at a silicon content of approximately 6.9 at.% and were stable in air up to 850℃. For the performance evaluation, the TiAlSiN coated drills were tested under accelerated machining conditions by drilling a 12 mm thick 304 stainless steel plate. Under dry conditions the uncoated drill bits failed after drilling 50 holes, whereas, TiAlSiN coated drill bits (Si = 5.5 at.%) drilled 714 holes before failure. Results indicated that for TiAlSiN coated drill bits the tool life increased by a factor of more than 14.
机译：这项工作报告了使用四阴极反应性脉冲直流不平衡磁控溅射系统制备的，在不同Si含量（5.5-8.1 at。％）下涂有TiAlSiN纳米复合涂层的高速钢钻头的性能。使用场发射扫描电子显微镜表征沉积态涂层的表面形态。分别使用X射线衍射，能量色散X射线分析，X射线光电子能谱评价晶体结构，化学组成和键合结构。还分别使用电位动力学极化，纳米压痕和拉曼光谱研究了TiAlSiN纳米复合涂层的腐蚀行为，力学性能和热稳定性。 TiAlSiN涂层的厚度约为2.5-2.9μm。这些涂层在硅含量约为6.9 at。％时表现出38 GPa的最大硬度，并且在高达850℃的空气中稳定。为了评估性能，对TiAlSiN涂层钻头在加速加工条件下通过钻12mm厚的304不锈钢板进行了测试。在干燥条件下，未涂层的钻头在钻了50个孔后会失效，而TiAlSiN涂层的钻头（Si = 5.5 at。％）在失效前钻了714个孔。结果表明，对于TiAlSiN涂层钻头，刀具寿命增加了14倍以上。

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