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首页> 外文期刊>Applied Surface Science >The Effect Of Heat Treatment On The Physical Properties Of Sol-gel Derived Zno Thin Films
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The Effect Of Heat Treatment On The Physical Properties Of Sol-gel Derived Zno Thin Films

机译：热处理对溶胶-凝胶衍生的Zno薄膜物理性能的影响

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摘要

Zinc oxide (ZnO) thin films were deposited on microscope glass substrates by sol-gel spin coating method. Zinc acetate (ZnAc) dehydrate was used as the starting salt material source. A homogeneous and stable solution was prepared by dissolving ZnAc in the solution of monoethanolamine (MEA). ZnO thin films were obtained after preheating the spin coated thin films at 250 ℃ for 5 min after each coating. The films, after the deposition of the eighth layer, were annealed in air at temperatures of 300 ℃, 400 ℃ and 500 ℃ for 1 h. The effect of thermal annealing in air on the physical properties of the sol-gel derived ZnO thin films are studied. The powder and its thin film were characterized by X-ray diffractometer (XRD) method. XRD analysis revealed that the annealed ZnO thin films consist of single phase ZnO with wurtzite structure (JCPDS 36-1451) and show the c-axis grain orientation. Increasing annealing temperature increased the c-axis orientation and the crystallite size of the film. The annealed films are highly transparent with average transmission exceeding 80% in the visible range (400-700 nm). The measured optical band gap values of the ZnO thin films were between 3.26 eV and 3.28 eV, which were in the range of band gap values of intrinsic ZnO (3.2-3.3 eV). SEM analysis of annealed thin films has shown a completely different surface morphology behavior.
机译：通过溶胶-凝胶旋涂法将氧化锌（ZnO）薄膜沉积在显微镜玻璃基板上。醋酸锌（ZnAc）脱水物用作起始盐原料。通过将ZnAc溶解在单乙醇胺（MEA）溶液中来制备均匀稳定的溶液。每次涂布后，将旋涂的薄膜在250℃下预热5分钟，即可得到ZnO薄膜。在沉积第八层之后，将膜在空气中分别在300℃，400℃和500℃的温度下退火1小时。研究了在空气中进行热退火对溶胶-凝胶衍生的ZnO薄膜的物理性能的影响。用X射线衍射仪（XRD）表征粉末及其薄膜。 XRD分析表明，退火后的ZnO薄膜由具有纤锌矿结构的单相ZnO组成（JCPDS 36-1451），并显示出c轴晶粒取向。升高退火温度会增加薄膜的c轴取向和微晶尺寸。退火后的薄膜是高度透明的，在可见光范围（400-700 nm）内平均透射率超过80％。测得的ZnO薄膜的光学带隙值在3.26 eV和3.28 eV之间，在本征ZnO的带隙值（3.2-3.3 eV）范围内。退火薄膜的SEM分析显示出完全不同的表面形态行为。

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