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Gas barrier properties of diamond-like carbon films coated on PTFE

机译：涂在PTFE上的类金刚石碳膜的阻气性

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摘要

Diamond-like carbon (DLC) films were deposited on polytetrafluoroethylene (PTFE) using radio frequency (RF) plasma-enhanced chemical vapour deposition (PE-CVD). Before the DLC coating, the PTFE substrate was modified with a N_2 plasma pre-treatment to enhance the adhesive strength of the DLC to the substrate. The influences of the N_2 plasma pre-treatment and process pressure on the gas permeation properties of these DLC-coated PTFE samples were investigated. In the Raman spectra, the G peak position shifted to a lower wave number with increasing process pressure. With scanning electron microscopy (SEM), a network of microcracks was observed on the surface of the DLC film without N_2 plasma pre-treatment. The density of these cracks decreased with increasing process pressure. In the film subjected to a N_2 plasma pre-treatment, no cracks were observed at any process pressure. In the gas barrier test, the gas permeation decreased drastically with increasing film thickness and saturated at a thickness of 0.2 μm. The DLC-coated PTFE with the N_2 plasma pre-treatment exhibited a greater reduction in gas permeation than did the samples without pre-treatment. For both sample types, gas permeation decreased with increasing process pressure.
机译：使用射频（RF）等离子体增强化学气相沉积（PE-CVD）将类金刚石碳（DLC）膜沉积在聚四氟乙烯（PTFE）上。在进行DLC涂层之前，对PTFE基材进行了N_2等离子体预处理，以增强DLC对基材的粘合强度。研究了N_2等离子体预处理和工艺压力对这些DLC涂层PTFE样品的气体渗透性能的影响。在拉曼光谱中，随着过程压力的增加，G峰位置移至较低的波数。用扫描电子显微镜（SEM），在未进行N_2等离子体预处理的情况下，在DLC膜的表面上观察到微裂纹的网络。这些裂纹的密度随着工艺压力的增加而降低。在经过N_2等离子体预处理的膜中，在任何处理压力下均未观察到裂纹。在阻气性测试中，气体渗透率随着膜厚度的增加而急剧下降，并在0.2μm的厚度处达到饱和。经过N_2等离子体预处理的DLC涂层PTFE的气体渗透率比未经预处理的样品更大。对于这两种类型的样品，气体渗透率都随着过程压力的增加而降低。

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  • 来源
    《Applied Surface Science》 |2009年第16期|7286-7290|共5页
  • 作者

    K. Ozeki; I. Nagashima; Y. Ohgoe; K.K. Hirakuri; H. Mukaibayashi; T. Masuzawa;

  • 作者单位

    Department of Mechanical Engineering, Ibaraki University, 4-12-1, Nakanarusawa, Hitachi, Ibaraki, 316-8511,Japan;

    Department of Mechanical Engineering, Ibaraki University, 4-12-1, Nakanarusawa, Hitachi, Ibaraki, 316-8511,Japan;

    Applied Systems Engineering, Graduate School of Science and Engineering, Tokyo Denki University, Ishizaka, Hatoyama, Hiki, Saitama, 350-0394, Japan;

    Applied Systems Engineering, Graduate School of Science and Engineering, Tokyo Denki University, Ishizaka, Hatoyama, Hiki, Saitama, 350-0394, Japan;

    Iwaki Co., Ltd., Fujikobo, Miyoshi-cho, Iruma-gun, Saitama, 354-0041, Japan;

    Department of Mechanical Engineering, Ibaraki University, 4-12-1, Nakanarusawa, Hitachi, Ibaraki, 316-8511,Japan;

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  • 正文语种 eng
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  • 关键词

    gas barrier; diamond-like carbon; PTFE; rocess pressure; adhesive strength;

    机译：阻气层类金刚石碳;聚四氟乙烯;工艺压力粘合强度;

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