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A study on the optical and electrical properties of direct-patternable ZnO films incorporated various contents of Pt nanoparticles

机译:掺入各种含量的Pt纳米粒子的可直接图案化ZnO薄膜的光学和电学性质研究

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Platinum nanoparticles were synthesized by the methanol reduction method, and their size was controlled to 3 nm on average using PVP [poly(N-vinyl-2-pyrrolidon)] as a protecting unit. Various contents of Pt nanoparticles were incorporated into ZnO solutions which were synthesized by a sol-gel process. ZnO films with Pt nanoparticles of various content were annealed at 500 ℃ and 600 ℃ for 1 h. The crystallinity increased with the annealing temperature and also slightly with the content of Pt nanoparticles. The sheet resistance of ZnO films decreased with the incorporation of Pt nanoparticles, however the decreasing behavior was not maintained with increasing content of Pt nanoparticles. A shift of valence band maximum energy of ZnO film with Pt nanoparticles to higher energy was also observed due to electron transfer from Pt nanoparticles to ZnO film. The optical transmittance was 88 ± 2% in the visible region for all the ZnO films. Well-defined 60 μm wide direct-patterned ZnO films containing Pt nanoparticles of 0.5 atomic percent could be formed without using dry etching process.
机译:通过甲醇还原法合成铂纳米颗粒,并使用PVP [聚(N-乙烯基-2-吡咯烷酮)]作为保护单元将其平均尺寸控制在3 nm。将各种含量的Pt纳米颗粒掺入通过溶胶-凝胶法合成的ZnO溶液中。在500℃和600℃下退火含不同含量的Pt纳米颗粒的ZnO薄膜1h。结晶度随退火温度而增加,并且随Pt纳米颗粒的含量而略有增加。 ZnO薄膜的薄层电阻随Pt纳米粒子的掺入而降低,但是随着Pt纳米粒子含量的增加,并不能保持其下降行为。由于电子从Pt纳米粒子转移到ZnO薄膜,还观察到具有Pt纳米粒子的ZnO薄膜的价带最大能量向更高的能量转移。所有ZnO薄膜在可见光区域的透光率均为88±2%。无需使用干法刻蚀工艺即可形成清晰的60μm宽的直接图案化ZnO膜,其中包含0.5%原子百分比的Pt纳米颗粒。

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