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Characterization Of Laf_3 Coatings Prepared At Different temperatures And Rates

机译:不同温度和速率制备的Laf_3涂层的表征

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LaF_3 thin films were prepared by thermal boat evaporation at different substrate temperatures and various deposition rates. X-ray diffraction (XRD), Lambda 900 spectrophotometer and X-ray photoelectron spectroscopy (XPS) were employed to study crystal structure, transmittance and chemical composition of the coatings, respectively. Laser-induce damage threshold (LIDT) was determined by a tripled Nd: YAG laser system with a pulse width of 8 ns. It is found that the crystal structure became more perfect and the refractive index increased gradually with the temperature rising. The LIDT was comparatively high at high temperature. In the other hand, the crystallization status also became better and the refractive index increased when the deposition rate enhanced at a low level. If the rate was super rapid, the crystallization worsened instead and the refractive index would lessen greatly. On the whole, the LIDT decreased with increasing rate.
机译:通过在不同的衬底温度和不同的沉积速率下进行热舟蒸发来制备LaF_3薄膜。利用X射线衍射(XRD),Lambda 900分光光度计和X射线光电子能谱(XPS)分别研究了涂层的晶体结构,透射率和化学成分。激光诱导损伤阈值(LIDT)由脉冲宽度为8 ns的三倍Nd:YAG激光系统确定。发现随着温度的升高晶体结构变得更加完美,并且折射率逐渐增加。 LIDT在高温下相对较高。另一方面,当沉积速率以低水平提高时,结晶状态也变得更好并且折射率增加。如果速率超快,则结晶反而恶化,并且折射率将大大降低。总体而言,LIDT随速率的增加而降低。

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