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首页> 外文期刊>Applied Surface Science >Analysis of codeposited Gd2O3/SiO2 composite thin films by phase modulated spectroscopic ellipsometric technique
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Analysis of codeposited Gd2O3/SiO2 composite thin films by phase modulated spectroscopic ellipsometric technique

机译：相位调制光谱椭偏法分析共沉积Gd2O3 / SiO2复合薄膜

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摘要

Tailoring of the refractive index of optical thin films has been a very fascinating as well as challenging topic for developing new generation optical coatings. In the present work a novel Gd2O3/SiO2 composite system has been experimented and probed for its superior optical properties through phase modulated spectroscopic ellipsometry, spectrophotometry and atomic force microscopy. The optical parameters of the composite films have been evaluated using Tauc-Lorentz (TL) formulations. In order to derive the growth dependent refractive index profiles, each sample film has been modeled as an appropriate multilayer structure where each sub-layer was treated with the above TL parameterizations. All codeposited films demonstrated superiority with respect to the band gap and morphological measurements. At lower silica mixing compositions such as in 10-20% level, the composite films depicted superior spectral refractive index profile, band gap as well as the morphology. This aspect highlighted the fact that microstructural densifications in composite films can override the chemical compositions while deciding the refractive index and optical properties in such thin films. (c) 2006 Elsevier B.V. All rights reserved.
机译：定制光学薄膜的折射率一直是开发新一代光学涂层的一个非常引人入胜的挑战。在本工作中，已经对新型Gd2O3 / SiO2复合系统进行了实验，并通过相调制光谱椭圆偏光法，分光光度法和原子力显微镜研究了其优越的光学性能。已使用Tauc-Lorentz（TL）配方评估了复合膜的光学参数。为了得出与生长有关的折射率分布，已将每个样品膜建模为适当的多层结构，其中每个子层均经过上述TL参数化处理。所有共沉积膜在带隙和形态学测量方面均显示出优越性。在较低的二氧化硅混合组成下，例如在10％至20％的含量下，复合膜表现出优异的光谱折射率分布，带隙以及形态。这一方面突出了这样一个事实，即复合膜中的微结构致密化可以覆盖化学成分，同时决定此类薄膜的折射率和光学性能。 （c）2006 Elsevier B.V.保留所有权利。

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