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Formation of Ge self-assembled quantum dots on a SixGe1-x buffer layer

机译:在SixGe1-x缓冲层上形成Ge自组装量子点

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Ge self-assembled quantum dots (SAQDs) grown on a relaxed Si0.75Ge0.25 buffer layer were observed using an atomic force microscopy (AFM) and a transmission electron microscopy (TEM). The effect of buried misfit dislocations on the formation and the distribution of Ge SAQDs was extensively investigated. The Burgers vector determination of each buried dislocation using the g(.)b = 0 invisibility criterion with plane-view TEM micrographs shows that Ge SAQDs grow at specific positions related to the Burgers vectors of buried dislocations. The measurement of the lateral distance between a SAQD and the corresponding misfit dislocation with plane-view and cross-sectional TEM images reveals that SAQDs form at the intersections of the top surface with the slip planes of misfit dislocations. The stress field on the top surface due to misfit dislocations is computed, and it is found that the strain energy of the misfit dislocations provides the preferential formation sites for Ge SAQDs nucleation. (c) 2005 Elsevier B.V. All rights reserved.
机译:使用原子力显微镜(AFM)和透射电子显微镜(TEM)观察了在松弛的Si0.75Ge0.25缓冲层上生长的Ge自组装量子点(SAQD)。广泛研究了掩埋失配位错对Ge SAQDs的形成和分布的影响。使用g(.b)= 0隐身标准和平面TEM显微照片对每个埋入位错的Burgers矢量确定表明,Ge SAQDs在与埋入位错的Burgers矢量有关的特定位置处生长。 SAQD与相应的错位错位之间的横向距离的测量(使用平面图和横截面TEM图像)显示,SAQD在顶表面与错位错位滑移平面的相交处形成。计算了由于失配位错引起的顶面上的应力场,发现失配位错的应变能为Ge SAQDs的成核提供了优先的形成部位。 (c)2005 Elsevier B.V.保留所有权利。

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