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Diffractive optical elements written by photodeposition

机译:通过光沉积写入的衍射光学元件

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In this work direct laser writing of diffractive optical elements (DOE) by photodeposition (PD) of amorphous selenium (a-Se) from colloid solutions has been investigated. We used a computer controlled laser scanner for patterning thin film micro-profiles creating thus planar optical elements by direct beam writing on surfaces immersed in a liquid phase PD cell. The laser employed was an argon ion laser at 488 nm wavelength, with powers up to 55 mW, for writing typically 25-250μm wide lines of 200 nm thickness at rates of about 150μm/s. Various elements made of photodeposited thin films on polymethyl-methacrylate (PMMA) substrates were produced for prototyping microlenses, linear grating arrays, cylindrical and circular profiled DOE patterns,
机译:在这项工作中,已经研究了通过胶体溶液中非晶硒(a-Se)的光沉积(PD)直接对衍射光学元件(DOE)进行激光写入。我们使用计算机控制的激光扫描仪对薄膜微轮廓进行构图,从而通过在浸入液相PD电池的表面上直接进行光束写入来创建平面光学元件。所使用的激光器是波长为488 nm的氩离子激光器,功率高达55 mW,通常以约150μm/ s的速率写入200-nm厚度的25-250μm宽的线。制作了各种由聚甲基丙烯酸甲酯(PMMA)基板上的光沉积薄膜制成的元件,用于制作微透镜,线性光栅阵列,圆柱和圆形轮廓DOE图案的原型,

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