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首页> 外文期刊>Applied Surface Science >Study of plasma expansion induced by femtosecond pulsed laser ablation and deposition of diamond-like carbon films
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Study of plasma expansion induced by femtosecond pulsed laser ablation and deposition of diamond-like carbon films

机译：飞秒脉冲激光烧蚀和类金刚石碳膜沉积引起的等离子体膨胀研究

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摘要

Diamond-like carbon (DLC) films were deposited in high vacuum conditions at room temperature, by ablating graphite targets with femtosecond laser pulses. The structure of the films deposited onto silicon substrates were characterized by Raman spectroscopy and X-ray absorption near edge spectroscopy (XANES). Films exhibit unusual structure, Raman spectra showing the presence of nanocrystalline diamond in amorphous matrix. Plasma plume was imaged by a gated ICCD camera in the UV-Visible range. The behavior of the plume shape as well as the kinetic energy of the particles are investigated. The behavior of the expansion dynamics of the plume and the properties of thin films are studied in order to determine the optimal growth conditions for femtosecond pulsed laser deposition of DLC films.
机译：通过用飞秒激光脉冲烧蚀石墨靶，在室温下在高真空条件下沉积类金刚石碳（DLC）膜。沉积在硅衬底上的膜的结构通过拉曼光谱法和X射线吸收近边缘光谱法（XANES）表征。膜表现出不同寻常的结构，拉曼光谱显示非晶态基质中存在纳米晶金刚石。等离子羽流由门控ICCD摄像机在UV-Visible范围内成像。研究了羽状形状的行为以及颗粒的动能。为了确定飞秒脉冲激光沉积DLC薄膜的最佳生长条件，研究了羽流的膨胀动力学行为和薄膜的性能。

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