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Study on the crack formation mechanism in nano-cutting of gallium arsenide

机译：砷化镓纳米切割裂缝形成机制研究

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摘要

Gallium arsenide is a typical brittle material, and crack formation is one of the most serious issues in the nanometric processing. This paper majors in studying crack formation mechanism in nano-cutting of gallium arsenide. In the molecular dynamics simulation of nano-cutting process, the main damage changes from dislocation to phase transformation with the increasing cutting speed. The amount of cracks increases with the higher cutting depth, and the deformation mode turns from ductile to a combination of ductile and brittle. Cracks appear at the boundary between amorphous layer and single crystal in the subsurface and tensile stress concentration is observed around the crack tip. The crack area is polycrystalline in the models with large tool radius. Brittle-ductile transition is observed by taper-cutting experiment of gallium arsenide, and the cutting depth is measured as 25 nm where the initial surface crack forms, which proves the low brittle-ductile transition depth of gallium arsenide. Micro cracks and polycrystals are found in the subsurface of transition area by cross section TEM, which is consistent with simulation results.
机译：砷化镓是典型的脆性材料，裂缝形成是纳米加工中最严重的问题之一。本文在纳米砷化镓纳米切割裂缝形成机制中的专业。在纳米切割过程的分子动力学模拟中，主要损伤从脱位转换时变化随着切割速度的增加。裂缝量随着较高的切削深度而增加，并且变形模式从延性转向延展性和脆性的组合。裂缝出现在非形貌层和单晶之间的边界处，在地下，并且在裂纹尖端周围观察到拉伸应力浓度。裂纹区域是具有大型刀具半径的模型中的多晶硅。通过泛酸砷化镓的切削实验观察到脆性延长转变，并且切割深度测量为25nm，其中初始表面裂缝形式，其证明了砷化镓的低脆性延展性过渡深度。通过横截面TEM在过渡区域的地下发现微裂纹和多晶，这与模拟结果一致。

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  • 来源
    《Applied Surface Science》 |2021年第2期|148322.1-148322.12|共12页
  • 作者

    Chen Chenghao; Lai Min; Fang Fengzhou;

  • 作者单位

    Tianjin Univ Ctr Micro Nano Mfg Technol State Key Lab Precis Measuring Technol & Instrume Tianjin 300072 Peoples R China;

    Tianjin Univ Ctr Micro Nano Mfg Technol State Key Lab Precis Measuring Technol & Instrume Tianjin 300072 Peoples R China;

    Tianjin Univ Ctr Micro Nano Mfg Technol State Key Lab Precis Measuring Technol & Instrume Tianjin 300072 Peoples R China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Gallium arsenide; Crack formation; Nano-cutting; Brittle-ductile transition;

    机译：砷化镓;裂缝形成;纳米切割;脆性韧性过渡;

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