Effect of Tip Mass on Modal Flexural Sensitivity of Rectangular AFM Cantilevers to Surface Stiffness Variations

著录项

• 来源
  《Arabian Journal for Science and Engineering》 |2014年第2期|1393-1397|共5页
• 作者

  Amir Farrokh Payam; Morteza Fathipour;

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• 作者单位

  1.Department of Electrical and Computer Engineering Nano-Electronics Center of Excellence University of Tehran Tehran Iran;

  1.Department of Electrical and Computer Engineering Nano-Electronics Center of Excellence University of Tehran Tehran Iran;

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• 收录信息 美国《科学引文索引》(SCI);
• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词

  AFM cantilever; Sensitivity; Surface stiffness; Tip mass;

  机译：原子力显微镜（AFM）悬臂梁;灵敏度;表面刚度;倾斜质量;