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Experimental investigation into cleanroom contamination build-up when applying reduced ventilation and pressure hierarchy conditions as part of demand controlled filtration

机译:作为需求控制过滤的一部分施加减少通风和压力等级条件时洁净室污染堆积的实验研究

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摘要

The use of cleanrooms is increasing and the expectation is that this growth will continue in the coming decade. When compared to an average office building, cleanrooms consume large amounts of energy due to their high Air Change Rates (ACRs) and strict air conditioning requirements. Application of Demand Controlled Filtration (DCF) is a means to reduce the (fan) energy demand. The question is whether the air quality is compromised at reduced ACR and overpressure conditions in the non-operational hours of a cleanroom. In a cleanroom mock-up, experiments have been performed to investigate the particle concentration build-up for different cases with DCF, including an extreme case with zero ACR and zero pressure difference. For the DCF conditions and the specific case study, conditions for particle concentration outside the cleanroom, that may still provide high-quality Good Manufacturing Practices (GMP) conditions in the cleanroom, are derived from the results. Furthermore, it assumes DCF application via occupancy sensing, i.e. starting DCF 30 min after the last person left the cleanroom. When applying DCF for a normal workweek (production 08:00-17:00), fan energy savings higher than 70% can be obtained without compromising the air quality requirements under normal circumstances. DCF, in combination with a reduced pressure difference, therefore is regarded as a feasible solution to reduce the energy demand of cleanrooms when the personnel in the cleanroom are the main source of contamination. These results are obtained for the presented case study. Though assuming a conservative approach, confirmation of these outcomes for other cleanrooms is recommended.
机译:洁净室的使用正在增加,期望是,这一增长将在未来十年中持续下去。与平均办公楼相比,洁净室由于其高空气变化率(ACRS)和严格的空调要求而消耗大量的能量。需求控制过滤(DCF)的应用是减少(风扇)能量需求的方法。问题是,在洁净室的非操作时间内,空气质量是否受到减少的ACR和过压条件。在洁净室大模型中,已经进行了实验以研究DCF的不同病例的颗粒浓度积聚,包括零ACR和零压差的极端情况。对于DCF条件和具体情况研究,洁净室外颗粒浓度的条件,可在洁净室中提供高质量的良好制造实践(GMP)条件,源自结果。此外,它通过占用感测来假设DCF应用,即在最后一个人离开洁净室后启动DCF 30分钟。在施加DCF的正常工作周(生产08:00-17:00)时,可以获得高于70%的风扇节能,而不会在正常情况下损害空气质量要求。 DCF与减压差相结合,因此被认为是可行的解决方案,以减少洁净室的能量需求,当洁净室中的人员是污染的主要来源时。这些结果是为呈现的案例研究获得的。虽然假设保守方法,建议确认其他洁净室的结果。

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