The fabrication and properties of planar inductors on a low-temperature co-fired ceramic (LTCC) substrate are studied together with computational simulations of their properties. One- and two-layer inductors with both square and spiral shapes were fabricated with and without a ground plane. The narrowest line width of conductors was 60 /spl mu/m and the size of the inductors was limited to 2.5/spl times/2.5 mm/sup 2/. Inductors were printed on the LTCC sheet by the gravure-offset printing. Via holes needed in the two-layer structures were made by excimer and Nd-YAG lasers. The layers were aligned and laminated at 70/spl deg/C with a pressure of 20 10/sup 6/ N/mm/sup 2/ for 15 min, and the laminated layers were co-fired at a peak temperature of 850/spl deg/C. The dependence of the electrical values on the geometrical dimensions and material properties of the inductor structures was studied both experimentally and by simulation. The electrical measurements were made by an LCR meter and a network analyzer, and the dimensions of the printed conductors were measured by a surface profilometer. The measured inductance values varied from a few nH to hundreds of nH depending on the structure and the resonant frequencies of the coils ranged from 300 MHz for the microstrip coils up to several GHz for the one-layer inductor structures. The measured inductance values were higher than the calculated ones and the variation of the measured electrical values was in the range of /spl plusmn/10%.
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机译：研究了低温共烧陶瓷（LTCC）衬底上平面电感器的制造和性能，并对其性能进行了仿真计算。具有和不具有接地平面的正方形和螺旋形的一层和两层电感器被制造出来。导体的最窄线宽为60 / spl mu / m，电感器的尺寸限制为2.5 / spl倍/2.5 mm / sup 2 /。通过凹版胶印将电感器印刷在LTCC板上。两层结构中所需的通孔是由准分子激光器和Nd-YAG激光器制成的。将层对准并在70 / spl deg / C和20 10 / sup 6 / N / mm / sup 2 /的压力下层压15分钟，然后将层压层在850 / spl的峰值温度下共烧摄氏度通过实验和仿真研究了电值对电感器结构的几何尺寸和材料性能的依赖性。电气测量通过LCR测量仪和网络分析仪进行，印刷导体的尺寸通过表面轮廓仪进行测量。根据结构的不同，测得的电感值从几nH到数百nH不等，线圈的谐振频率范围从微带线圈的300 MHz到单层电感器结构的几GHz。测量的电感值高于计算的电感值，并且测量的电气值的变化在/ spl plusmn / 10％的范围内。
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